PRODUCT

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取扱修理一覧

ターボポンプ
ALCATEL

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • ACT1300
  • ATH1300M
  • ATH1600H
  • ATH1600M
  • ATH2300M
  • ATH400M
  • ATP100
  • ATP150
  • ATP300
  • ATP400
  • ATP5150
  • ATP5400
  • ATP5402CIS
  • ATP80
  • ATP900
  • MDP5011
  • ACT2300M
  • ACT600M
  • ACT600T
  • CF450-5300
  • CFF450-5400
  • Drytel31
  • Drytel34
  • Drytel100
  • Ui692 ACT600HT ACT600HT
BALZERS

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • PMP02
  • TMU065
EBARA

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • ET1600
  • ET1600WS
  • ET300
  • ET300C
  • ET300P
  • ET300PD
  • ET300UZ
  • ET300W
  • ET300WS
  • ET300WS-A
  • ET450C
  • ET500WS
  • ET600D
  • ET600H
  • ET600P
  • ET600WS
  • ET600WSTF
  • ET601H
  • ET800
  • ET800H
  • ET800WS
  • ET801H
  • ET600
  • ET1606
  • AET16-4490C 1606W-TF 1606W-TF
  • 305W-A TMP controller
  • 1606W-TF TMP controller
EDWARDS

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • STP-A2203C
  • STP-A2203C2
  • STP-A2203KV
  • STP-A2203LVS
  • STP-A2203P
  • STP-A2203PS
  • STP-H2001CK1B
  • STP-H2001K1
  • STP-H2001K1B
  • STP-H2002C
  • STP-H2002WAV
  • STP-H2003C
  • STP-XA2603C
  • STP-XA2703C
  • STP-XA2703CV
  • STP-XH2603C
  • STP-XH2603P
  • STP-XH2703C
  • STP-XH3203P
  • SCU-H301C
  • YT17-BA-000 STP-A803 series Air-cooled unit
  • TMP-A2203PV STP-A2203PV
  • SCU-301C TMP controller
  • SCU-H2001K2 TMP controller
LEYBOLD

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • Mag 1200
  • Mag 2000
  • Mag 2010CHT
  • Mag 400
  • Mag 900
  • MagW 1300C
  • MagW 1500CT
  • MagW 2000
  • MagW 2010CHT
  • MagW 830
  • NT10
  • NT340M
  • T1600
  • TMP-1100C
  • TMP-151
  • TMP-340M
  • TMP-361
  • TMP-361C
  • TMP-450
  • TMP-50
  • TMP-600
  • TW250S
  • TW701
  • VAC1000C
  • VAC340M
  • VAC361C
  • VAC450
  • IM110D
  • MAG DRIVE 2000
  • TURBOTRONIK NT151/361
  • TURBOTRONIK NT20
  • TURBOTRONIK NT340M
  • TW70H
  • 800075v0001 TD20
  • NT 340 MC/T TMP controller
MITSUBISHI

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • FT1200W ・ (A1K1)
  • FT1400W ・ (A1K1)
  • FT2200W
  • FT3000W
  • FT3300W
  • FT3301W
  • FT-350D-VG250NS
  • FT700 ・ (A1K1)
  • FT700W ・ (A1K1)
  • FT800W ・ (A1K1)
  • PT150
  • PT1500
  • PT500
  • FT1200W
  • FTI-700
  • FT-700-A101
  • FTI-700-T7
  • FT2200W-W2E1 FT2200W
  • FT700-A1K1 TMP
  • FT-2200W−W101 TMP
PFEIFFER

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • TMH063
  • TMH064
  • TMH064P
  • TMH071P
  • TMH1001P
  • TMH1600PC
  • TMH1601P
  • TMH240
  • TMH260P
  • TMH520
  • TMH520P
  • TMH520SG
  • TMH521
  • TMH521P
  • TMH521UPX
  • TMH521YP
  • TPH1201P
  • TPH1501P
  • TPH1600
  • TPH2101PCX
  • TPH2301PCX
  • TPH240
  • TPH510U
  • TPH520
  • TPU060
  • TPU062
  • TPU065
  • TPU170
  • TC750
  • TPH2101UPC
  • Hipace2300UP
  • Hipace2300UC
RIGAKU

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • RTP300VRC
  • RTPG151
  • RTP 300RC
SHIMADZU

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • TMC 1003MC
  • TMP-1000C
  • TMP-1000L
  • TMP-1000LK
  • TMP-1002
  • TMP10023LM
  • TMP-1002LM
  • TMP-1003LM
  • TMP-1003LMC
  • TMP-1003LMC(LF)
  • TMP-1003MC
  • TMP-1103LMP
  • TMP-1303LMC
  • TMP-1303MTG
  • TMP-1500L
  • TMP-2003
  • TMP-2003LM
  • TMP-2003LMEC-K1
  • TMP-200CM
  • TMP-200LM
  • TMP-202LM
  • TMP-203LM
  • TMP-203M
  • TMP-280L
  • TMP3003LM
  • TMP3003M
  • TMP-303LM
  • TMP-303LMC(A1)
  • TMP-303M
  • TMP3202LMC-K1
  • TMP3203LMEC-K1
  • TMP3203LM-N1
  • TMP3403
  • TMP3403LMC-T1
  • TMP-35
  • TMP3603LMC
  • TMP3603LMC-A1
  • TMP-403LM
  • TMP-550L
  • TMP-70
  • TMP-802
  • TMP-803
  • TMP-803LM
  • TMP-803M
  • TMP-A2203C2
  • TMP-A803C
  • TMPH3603LMC
  • TMP-V2304MC
  • TMP-W2403
  • TMP-W2403LMC(T2)
  • EI-202M
  • EI-3403M
  • PTI-1500-T9 TMP controller
VARIAN

下記型式のターボポンプは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式に対応するコントローラも修理可能です。

  • V1000
  • V1000 ICE
  • V300HT
  • V550
クライオポンプ
HELIX
  • 8116142G001
ロボット
AMAT VACUUM ROBOT

下記型式のロボットは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式のロボットに対応するコントローラも修理可能です。

  • VARIOUS ARMSET
  • ARM SET ROBOT
  • HP/HP+ ROBOT
  • VHP/VHP+ ROBOT
  • VHP/VHP+(+Arm+Soup Bowl) ROBOT
BROOKS

下記型式のロボットは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式のロボットに対応するコントローラも修理可能です。

  • AQR7 ROBOT
  • ATR7 ROBOT
  • ATR8 ROBOT
  • MAG6 ROBOT
  • MAG7 ROBOT
  • MAG8 ROBOT
  • MTR5 ROBOT
  • VTR5 ROBOT
  • Irvine Sorter SORTE
KAWASAKI

下記型式のロボットは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式のロボットに対応するコントローラも修理可能です。

  • A3 ROBOT
YASKAWA

下記型式のロボットは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式のロボットに対応するコントローラも修理可能です。

  • DDCVR-CR1041  ROBOT
  • XU-RSM0120B  ROBOT
  • XU-RSM4800 R  ROBOT
  • XU-RSM5300(A)  ROBOT
  • XU-RSM5330  ROBOT
  • YSBL-CHA  ROBOT
  • YSBL-CHB  ROBOT
BROOKS AUTOMATION

下記型式のロボットは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式のロボットに対応するコントローラも修理可能です。

  • DRIVER BOARD ROBOT PCB
  • MCC BOARD ROBOT PCB
  • T1/T2 BOARD ROBOT PCB
PRI ROBOT

下記型式のロボットは全てオーバーホール対応可能です。在庫により一部Exchangeも可能です。
下記型式のロボットに対応するコントローラも修理可能です。

  • GALIL BOARD ROBOT PCB
  • I/O BOARD ROBOT PCB
  • INTERFACE BOARD ROBOT PCB
電源関係(RF・Matcher・Ozone Generator・RPS・Microwave等)
AE

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • MDX-10K(M)  DC POWER SUPPLY
  • MDX-2.5  DC POWER SUPPLY
  • MDX-20K(M)  DC POWER SUPPLY
  • MDX-500  DC POWER SUPPLY
  • MDX-L12  DC POWER SUPPLY
  • MDX-L12(M)  DC POWER SUPPLY
  • MDX-L18K  DC POWER SUPPLY
  • MDX-L6  DC POWER SUPPLY
  • Pinnacle Series(20K|10K|6K| etc)  DC POWER SUPPLY
  • 13.56Mhz 3156011-000-A  RF GENERATOR
  • 13.56Mhz 3156011-002  RF GENERATOR
  • 13.56Mhz 3156011-002A  RF GENERATOR
  • 13.56Mhz 3156011-006  RF GENERATOR
  • APEX1513  RF GENERATOR
  • APEX3013  RF GENERATOR
  • APEX5513  RF GENERATOR
  • ATLAS2012  RF GENERATOR
  • HFV-8000  RF GENERATOR
  • PDW-2200  RF GENERATOR
  • PDW-600  RF GENERATOR
  • PDX-1250  RF GENERATOR
  • PDX-1400  RF GENERATOR
  • PDX-2500  RF GENERATOR
  • PDX-5000  RF GENERATOR
  • PDX-8000  RF GENERATOR
  • PDX-900  RF GENERATOR
  • PDX-900 2V  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-003  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-003A  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-007  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-007A  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-007C  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-013  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-013A  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-013B  RF GENERATOR
  • RFDS 2000-2V M/N 3155038-013C  RF GENERATOR
  • RFDS-1250 M/N 3155059-000  RF GENERATOR
  • RFDS-1250 M/N 3155059-026  RF GENERATOR
  • RFDS-3000  RF GENERATOR
  • RFDS-3001  RF GENERATOR
  • RFG 5500 M/N 3155051-001  RF GENERATOR
  • RFG 5500 M/N 3155051-002  RF GENERATOR
  • RFG 5500 M/N 3155051-003  RF GENERATOR
  • RFG 5500 M/N 3155051-004  RF GENERATOR
  • RFG 5500 M/N 3155051-005  RF GENERATOR
  • RFG 5500 M/N 3155051-006  RF GENERATOR
  • RFG 5500 M/N 3155051-013  RF GENERATOR
  • RFG 5500 M/N 3155051-015  RF GENERATOR
  • RFG 5500 M/N 3155051-115  RF GENERATOR
  • RFG 5500 M/N 3155051-115A  RF GENERATOR
  • RFG 5500 M/N 3155051-115B  RF GENERATOR
  • RFG 5500 M/N 3155051-115C  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-003  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-003A  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-003B  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-003C  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-003D  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-028  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-028A  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-028B  RF GENERATOR
  • RFG-1250 HALO M/N 3155027-028C  RF GENERATOR
  • RFG-1250 M/N 3155027-000  RF GENERATOR
  • RFG-1250 M/N 3155027-001  RF GENERATOR
  • RFG-1250 M/N 3155027-002  RF GENERATOR
  • RFG-1250 M/N 3155027-003  RF GENERATOR
  • RFG-1250 M/N 3155027-004  RF GENERATOR
  • RFG-1250 M/N 3155027-005  RF GENERATOR
  • RFG-1250 M/N 3155027-006  RF GENERATOR
  • RFG-1250 M/N 3155027-007  RF GENERATOR
  • RFG-1250 M/N 3155027-008  RF GENERATOR
  • RFG-1250 M/N 3155027-008A  RF GENERATOR
  • RFG-1250 M/N 3155027-008B  RF GENERATOR
  • RFG-1250 M/N 3155027-008C  RF GENERATOR
  • RFG-1250 M/N 3155027-008D  RF GENERATOR
  • RFG-1251 M/N 3155107-002  RF GENERATOR
  • RFG-1251 M/N 3155107-002A  RF GENERATOR
  • RFG-1251 M/N 3155107-002B  RF GENERATOR
  • RFG-1251 M/N 3155107-002C  RF GENERATOR
  • RFG-1251 M/N 3155107-002D  RF GENERATOR
  • RFG-1251 M/N 3155107-101  RF GENERATOR
  • RFG-1251 M/N 3155107-101A  RF GENERATOR
  • RFG-1251 M/N 3155107-101B  RF GENERATOR
  • RFG-2000-2V  RF GENERATOR
  • RFG-3000  RF GENERATOR
  • RFG-3000 M/N 3155038-001  RF GENERATOR
  • RFG-3000 M/N 3155038-001A  RF GENERATOR
  • RFG-3000 M/N 3155038-001B  RF GENERATOR
  • RFG-3000 M/N 3155038-001C  RF GENERATOR
  • RFG-3001  RF GENERATOR
  • RFG-5500  RF GENERATOR
  • RFX II 1250  RF GENERATOR
  • RFX II 3000 M/N 3155047-000  RF GENERATOR
  • RFX II 3000 M/N 3155047-001  RF GENERATOR
  • RFX II 3000 M/N 3155047-002  RF GENERATOR
  • RFX II 3000 M/N 3155047-003  RF GENERATOR
  • RFX II 3000 M/N 3155047-004  RF GENERATOR
  • RFX II 3000 M/N 3155047-005  RF GENERATOR
  • RFX-1250  RF GENERATOR
  • RFX-2500  RF GENERATOR
  • RFX-3000  RF GENERATOR
  • RFX-600  RF GENERATOR
  • 1110-00056  RF MATCHER
  • 1110-01043  RF MATCHER
  • 1110-01046  RF MATCHER
  • 13.56 Mhz 3155031-004  RF MATCHER
  • 13.56 Mhz 3155031-004A  RF MATCHER
  • 13.56 Mhz 3155031-004B  RF MATCHER
  • 13.56 Mhz 3155031-004C  RF MATCHER
  • 13.56 Mhz 3155031-011  RF MATCHER
  • 13.56 Mhz 3155031-011B  RF MATCHER
  • 13.56 Mhz 3155031-014  RF MATCHER
  • 13.56 Mhz 3155031-014B  RF MATCHER
  • 13.56 Mhz 3155031-014C  RF MATCHER
  • 13.56 Mhz 3155031-014D  RF MATCHER
  • 13.56 Mhz 3155031-020  RF MATCHER
  • 13.56 Mhz 3155031-020A  RF MATCHER
  • 13.56 Mhz 3155086-001  RF MATCHER
  • 13.56 Mhz 3155086-002  RF MATCHER
  • 13.56 Mhz 3155086-102  RF MATCHER
  • 13.56 Mhz AZX10  RF MATCHER
  • 13.56 Mhz AZX63  RF MATCHER
  • 13.56 Mhz AZX90  RF MATCHER
  • 3155162-002  RF MATCHER
  • AZX-90  RF MATCHER
  • DPS SOURCE MATCHER  RF MATCHER
  • MERCURY3013  RF MATCHER
  • RAPID F 6KW|8KW  RPS
  • CESAR 0210  RF Generator
  • CESAR 0220  RF Generator
  • CESAR 0230  RF Generator
  • CESAR 1310  RF Generator
  • CESAR 1312  RF Generator
  • CESAR 1320  RF Generator
  • CESAR 6010  RF Generator
  • CESAR 1330  RF Generator
  • LFGS 1250A  RF Generator
  • RFPP LF10A  RF Generator
  • RFPP LF-5  RF Generator
  • AE RFPP RF20S  RF Generator
  • RFPP RF10S  RF Generator
  • APEX 1513  RF Generator
  • APEX 3013  RF Generator
  • APEX 5513  RF Generator
  • APEX 1500/13  RF Generator
  • APEX 5500/13  RF Generator
  • APEX 10KW/13  RF Generator
  • APEX 2013  RF Generator
  • RFG2000-2V  RF Generator
  • RFG-500  RF Generator
  • RFG3000  RF Generator
  • RFG5500  RF Generator
  • RFG1250  RF Generator
  • RFDS 1250  RF Generator
  • RFG1250 HALO  RF Generator
  • RFG3001  RF Generator
  • RFG1251  RF Generator
  • RFX-500  RF Generator
  • RFX?1250  RF Generator
  • RFX?5500  RF Generator
  • RFX 600A  RF Generator
  • Sparc-le V  DC Power Supply
  • MDX 500  RF Generator
  • MDX1.5K  RF Generator
  • MDX-10K MASTER  RF Generator
  • AE MDX-L12  DC Power Supply
  • MDX-L12 HALO  DC Power Supply
  • MDX-L12-652  DC Power Supply
  • Pinnacle 6KW  DC Power Supply
  • Pinnacle 12KW  DC Power Supply
  • Pinnacle 20KW  DC Power Supply
  • Atlas 2012  RF Generator
  • PArAmount 1513  RF Generator
  • PArAmount 3013  RF Generator
  • PArAmount 6013  RF Generator
  • PDX900-2V  RF Generator
  • PDX1400  RF Generator
  • PDX 5000  RF Generator
  • PDW 2200  RF Generator
  • OVAtion 2560SF  RF Generator
  • PE-1000  RF Generator
  • HFV 8000 3KW  RF Generator
  • HFV 8000 5KW  RF Generator
  • HFV 8000 8KW  RF Generator
  • ASPECT 5013  RF Generator
  • AZX SERIES Match  Matching Box
  • Fixed match  Matching Box
  • MERCURY 3013 MATCH  Matching Box
  • Navigator Series  Matching Box
  • TOP MATCH  Matching Box
  • VM0450W  RF Generator
  • VM1000A  RF Generator
  • VM-4040  RF Generator
  • VM1500AW  RF Generator
  • 3151501-004  RPS
  • 3151801-001  RPS
  • 3151801-004  RPS
  • 3151802-003  RPS
  • 0190-19021-001R  RF Generator APEX3013 3156113-006 D
  • 0190-19022-001  RF Generator APEX1513 3156110-005 D
  • 3156330-005  RF Generator Paramount 3013
  • 0190-19021W  RF Generator APEX3013 3156113-006 C
  • 0190-19021-001  RF Generator APEX3013 3156113-006 D
  • 0190-19022W  RF Generator APEX1513 3156110-005 D
  • 660-034419-005  RF Generator Ovation2560SF 3150295
  • 0190-13025  RPS Rapid 3151801-004
MKS(ENI・ASTEX)

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • DCG-100Z  DC POWER SUPPLY
  • DCG-200Z  DC POWER SUPPLY
  • DCG-400Z  DC POWER SUPPLY
  • 94-1104  MICROWAVE
  • 94-1104-U  MICROWAVE
  • AX-2115  MICROWAVE
  • AX-2518  MICROWAVE
  • AX-2530  MICROWAVE
  • AX-2560  MICROWAVE
  • C12935  MICROWAVE
  • C12935-U  MICROWAVE
  • C13170  MICROWAVE
  • FI10002  MICROWAVE
  • FI20045  MICROWAVE
  • FI20061  MICROWAVE
  • FI20191  MICROWAVE
  • FI20606  MICROWAVE
  • GL139  MICROWAVE
  • AX8200 SERIES(AX8200A/AX8200A-CER|etc)  OZONE GENERATOR
  • AX8402 SERIES  OZONE GENERATOR
  • AX8403 SERIES  OZONE GENERATOR
  • AX8406 SERIES  OZONE GENERATOR
  • AX8407 SERIES  OZONE GENERATOR
  • AX-2530  RF GENERATOR
  • AX-2630  RF GENERATOR
  • AX3060|1|2  RF GENERATOR
  • AX-7690PSK-04  RF GENERATOR
  • AX-8555  RF GENERATOR
  • AX8560-3020  RF GENERATOR
  • AX-8560-7100  RF GENERATOR
  • FI20160-1  RF GENERATOR
  • FI20160-3  RF GENERATOR
  • FI20162-1  RF GENERATOR
  • FI20606-1  RF GENERATOR
  • Smart Match  RF GENERATOR
  • SXRHC  RF GENERATOR
  • ACG-10  RF GENERATOR
  • ACG-10 MRC UNIT  RF GENERATOR
  • ACG-10B  RF GENERATOR
  • ACG-10T  RF GENERATOR
  • ACG-10XL  RF GENERATOR
  • ACG-3  RF GENERATOR
  • ACG-3B  RF GENERATOR
  • ACG-3XL  RF GENERATOR
  • ACG-5  RF GENERATOR
  • ACG-5J  RF GENERATOR
  • ACG-5XL  RF GENERATOR
  • ACG-6  RF GENERATOR
  • ACG-6B  RF GENERATOR
  • DC22M  RF GENERATOR
  • GENESIS SERIES  RF GENERATOR
  • GEW-2527  RF GENERATOR
  • GEW-3040  RF GENERATOR
  • GHW-12  RF GENERATOR
  • GHW-12A  RF GENERATOR
  • GHW-12Z  RF GENERATOR
  • GHW-25  RF GENERATOR
  • GHW-50  RF GENERATOR
  • GHW-50A  RF GENERATOR
  • GHW-55A  RF GENERATOR
  • GHW-70  RF GENERATOR
  • GHW-85(80)  RF GENERATOR
  • GMW-12  RF GENERATOR
  • GMW-25  RF GENERATOR
  • GMW-50  RF GENERATOR
  • HF-1  RF GENERATOR
  • LPG-12  RF GENERATOR
  • LPG-3  RF GENERATOR
  • LPG-6  RF GENERATOR
  • NOVA-25  RF GENERATOR
  • NOVA-50  RF GENERATOR
  • OEM-10B  RF GENERATOR
  • OEM-12  RF GENERATOR
  • OEM-1250  RF GENERATOR
  • OEM-12A  RF GENERATOR
  • OEM-12AL  RF GENERATOR
  • OEM-12AL-01  RF GENERATOR
  • OEM-12B  RF GENERATOR
  • OEM-12B-02  RF GENERATOR
  • OEM-12B3  RF GENERATOR
  • OEM-12B3-02  RF GENERATOR
  • OEM-12L  RF GENERATOR
  • OEM-12XL  RF GENERATOR
  • OEM-2000  RF GENERATOR
  • OEM-25A  RF GENERATOR
  • OEM-25B  RF GENERATOR
  • OEM-25XL  RF GENERATOR
  • OEM-28B  RF GENERATOR
  • OEM-28B-04  RF GENERATOR
  • OEM-50  RF GENERATOR
  • OEM-50N  RF GENERATOR
  • OEM-50XL  RF GENERATOR
  • OEM-6  RF GENERATOR
  • OEM-650  RF GENERATOR
  • OEM-6A  RF GENERATOR
  • OEM-6AM  RF GENERATOR
  • OEM-6B  RF GENERATOR
  • OEM-6B-01M3  RF GENERATOR
  • OEM-6B-02  RF GENERATOR
  • OEM-6M  RF GENERATOR
  • OEM-6XL  RF GENERATOR
  • ONE BOX OB2 27MHz  RF GENERATOR
  • ONE BOX OB2 2MHz  RF GENERATOR
  • OPTIMA DCG-200A-S00  RF GENERATOR
  • OPTIMA DCG-400A-00  RF GENERATOR
  • PL-1HF  RF GENERATOR
  • PL-2HF  RF GENERATOR
  • PL-3HF  RF GENERATOR
  • Quanta-10  RF GENERATOR
  • SPECTRUM 10513-00  RF GENERATOR
  • SPECTRUM 11002(11002-00)  RF GENERATOR
  • SPECTRUM 3013-08  RF GENERATOR
  • SPECTRUM B-5002  RF GENERATOR
  • AX3060  RF MATCHER
  • AX9018  RF MATCHER
  • AX9030  RF MATCHER
  • FI10001  RF MATCHER
  • FI20634  RF MATCHER
  • MHW-5-01M3  RF MATCHER
  • MW-10  RF MATCHER
  • MW-10D  RF MATCHER
  • MW-25  RF MATCHER
  • MW-25D  RF MATCHER
  • MW-25D-02  RF MATCHER
  • MW-25LD-02  RF MATCHER
  • MW-5  RF MATCHER
  • MW-55LD-01  RF MATCHER
  • MW-5D  RF MATCHER
  • MWD-55LD  RF MATCHER
  • MWM-25-02X  RF MATCHER
  • ONE BOX OB2(Dual Match)  RF MATCHER
  • DPGD-10  RF SUPPLY
  • DPGS-10  RF SUPPLY
  • ASTRON 2L  RPS
  • ASTRON 3L  RPS
  • ASTRON 6L  RPS
  • ASTRON 8L|15L|(22L.30L)  RPS
ADTEC

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • AX-1000  RF GENERATOR
  • AX-1000II  RF GENERATOR
  • AX-1000III  RF GENERATOR
  • AX-1000LFIII  RF GENERATOR
  • AX-1500IIII  RF GENERATOR
  • AX-2000  RF GENERATOR
  • AX-2000EUII  RF GENERATOR
  • AX-2000III SERIES  RF GENERATOR
  • AX-300  RF GENERATOR
  • AX-3000  RF GENERATOR
  • AX-3000III SERIES  RF GENERATOR
  • AX-300III  RF GENERATOR
  • AX-500  RF GENERATOR
  • AX-5000  RF GENERATOR
  • AX-5000III  RF GENERATOR
  • AX-5000W-AKT  RF GENERATOR
  • AX-600III  RF GENERATOR
  • MA-1CY  RF GENERATOR
  • AM-2000S-M  RF MATCHER
  • AMV1000 SERIES  RF MATCHER
  • AMV1000-ASM  RF MATCHER
  • AMV2000 SERIES  RF MATCHER
  • AX7650  RPS
  • AX7651  RPS
  • AX7657  RPS
  • AX7670  RPS
  • AX7851  RPS
  • FI20120  RPS
  • FI20620  RPS
  • FI26201  RPS
  • AX-1000?  RF Generator
  • AX-4000III-40M-U1  RF Generator
  • AX-7500  RF Generator
  • AX-10000  RF Generator
  • AX-20000  RF Generator
  • TX-03  RF Generator
  • TX-06  RF Generator
  • TX-10  RF Generator
  • TX-20  RF Generator
  • TX-30  RF Generator
  • TX-4000-40M  RF Generator
  • TX-6000-40M  RF Generator
  • AXR-1000LFIII-LC  RF Generator
  • TS-05  RF Generator
  • TS-10  RF Generator
  • TS-20  RF Generator
  • TS-30  RF Generator
  • AMVG Series  Matching Box
DAIHEN

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • AGA-27B  RF GENERATOR
  • AGA-50B  RF GENERATOR
  • DRFS-10SB  RF GENERATOR
  • MFG-15SA  RF GENERATOR
  • MFG-20SA  RF GENERATOR
  • RGA-10A  RF GENERATOR
  • WGA-30A  RF GENERATOR
  • WGA-30C  RF GENERATOR
  • WGA-50E  RF GENERATOR
  • RMN-30  RF MATCHER
  • RMN-50H1  RF MATCHER
  • RMN-6C  RF MATCHER
  • RGA-400  RF Generator
  • RGA-300C2  RF Generator
  • RGA-150A  RF Generator
  • RGA-50C  RF Generator
  • RGA-30  RF Generator
  • AGA-30  RF Generator
  • AGA-27  RF Generator
  • AGA-50B2  RF Generator
  • MFG-15SA6  RF Generator
  • MFG-20B  RF Generator
  • MFG-20SA Controller  RF Generator
  • MFG-20SA3  RF Generator
  • MGA-20A  RF Generator
  • MGA-30  RF Generator
  • MGA-50  RF Generator
  • SGP151HV  RF Generator
  • SGP101HV  RF Generator
  • SGP-30  RF Generator
  • SGP-50  RF Generator
  • SVP-15  RF Generator
  • AMN-30  Matching Box
  • AMN-50  Matching Box
  • AMN-30C11  Matching Box
  • AMN-50B2  Matching Box
  • AMN-50H  Matching Box
  • AMN-50L  Matching Box
  • AMN-50K  Matching Box
  • AMN-50F  Matching Box
  • MFM-20SA  Matching Box
  • NX-AMN-50E3  Matching Box
  • RMN-100B1  Matching Box
  • RMN-200A  Matching Box
  • RMN-200B  Matching Box
  • RMN-300  Matching Box
  • RMN-25A  Matching Box
  • RMN-50N  Matching Box
  • RMN-75A2  Matching Box
  • RMN-50RA  Matching Box
  • RMN-10  Matching Box
  • RMN-50P  Matching Box
  • RMN-50T  Matching Box
  • RMN-50U  Matching Box
  • RMN-50W  Matching Box
  • WMN-50C6  Matching Box
  • WMN-50H6A  Matching Box
  • HFA-50A RF Generator  RF Generator
RFPP(AE)

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • 3150076-001  RF GENERATOR
  • HF-10  RF GENERATOR
  • LF-10  RF GENERATOR
  • LF-10A  RF GENERATOR
  • LF-20  RF GENERATOR
  • LF-30  RF GENERATOR
  • LF-5  RF GENERATOR
  • LF-5S  RF GENERATOR
  • RF-10  RF GENERATOR
  • RF-10M  RF GENERATOR
  • RF-10S  RF GENERATOR
  • RF-20  RF GENERATOR
  • RF-20M  RF GENERATOR
  • RF-20R  RF GENERATOR
  • RF-20S  RF GENERATOR
  • RF-30M  RF GENERATOR
  • RF-30S  RF GENERATOR
  • RF-30SW  RF GENERATOR
  • RF-5  RF GENERATOR
  • RF-50  RF GENERATOR
  • RF-50S  RF GENERATOR
  • RF-5S  RF GENERATOR
  • ATL-100RA  RF MATCHER
ASTEX

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • ASTEX AX2115  Microwave
ENI

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • 0190-22918W/002 DCG-200ZH-S00  DC Plasma Generator
TDK-LAMBDA

下記型式の電源・マッチャ・RPSなどは全て定額修理・オーバーホール対応可能です。
在庫により一部Exchangeも可能です。

  • EWS-15-24 DC24V電源15w  DC POWER SUPPLY
Valve
CKD

下記型式のバルブは全て定額修理対応可能です。

  • AVB932-X0051  ANGLE VALVE
  • VEC-V8-X0101  ISO ANGLE VALVE
  • VEC-V8-X0109  ISO ANGLE VALVE
  • VEC-VH8-X0102  ISO ANGLE VALVE
  • VEC-VH8-X0305  ISO ANGLE VALVE
  • AMD512-16S-03-TL  VALVE
  • AMB61-40AU-4-4  WATER VALVE
  • AMD61L-32AU-4-4  WATER VALVE
EDWARDS

下記型式のバルブは全て定額修理対応可能です。

  • ISOLATION VALVE  ANGLE VALVE
MKS

下記型式のバルブは全て定額修理対応可能です。

  • 93-6127 DUAL BELLOWS|PN : 796-801289-001|NW40  ANGLE VALVE
  • LPV-40-AK-COVS (99B-0558) NW40| 100991861  ANGLE VALVE
  • FORELINE VALVE  ANGLE VALVE
  • NW40  ANGLE VALVE
  • 153B  EXHAUST THROTTLE VALVE
  • 153D-15972  EXHAUST THROTTLE VALVE
  • 153D-15973  EXHAUST THROTTLE VALVE
  • 253A-11010  EXHAUST THROTTLE VALVE
  • 253B-11010  EXHAUST THROTTLE VALVE
  • 253B-11020  EXHAUST THROTTLE VALVE
  • 253B-11102  EXHAUST THROTTLE VALVE
  • 253B-11203  EXHAUST THROTTLE VALVE
  • 253B-11247  EXHAUST THROTTLE VALVE
  • 253B-11328  EXHAUST THROTTLE VALVE
  • 253B-11701  EXHAUST THROTTLE VALVE
  • 253B-13133  EXHAUST THROTTLE VALVE
  • 253B-1-40-1  EXHAUST THROTTLE VALVE
  • 253B-14340  EXHAUST THROTTLE VALVE
  • 253B-14579  EXHAUST THROTTLE VALVE
  • 253B-15415  EXHAUST THROTTLE VALVE
  • 253B-15488  EXHAUST THROTTLE VALVE
  • 253B-15665  EXHAUST THROTTLE VALVE
  • 253B-16082  EXHAUST THROTTLE VALVE
  • 253B-16083 PCB type| Flange KF50| AMAT 3870-03055  EXHAUST THROTTLE VALVE
  • 253B-16083  EXHAUST THROTTLE VALVE
  • 253B-16182  EXHAUST THROTTLE VALVE
  • 253B-21489  EXHAUST THROTTLE VALVE
  • 253B-21977  EXHAUST THROTTLE VALVE
  • 253B-22154  EXHAUST THROTTLE VALVE
  • 253B-23957  EXHAUST THROTTLE VALVE
  • 253B-23958  EXHAUST THROTTLE VALVE
  • 253B-26373  EXHAUST THROTTLE VALVE
  • 253BX-13964  EXHAUST THROTTLE VALVE
  • 653B-13552  EXHAUST THROTTLE VALVE
  • 653B-14814  EXHAUST THROTTLE VALVE
  • 653B-22815  EXHAUST THROTTLE VALVE
  • 653B-2-50-2  EXHAUST THROTTLE VALVE
  • 683B-23795  EXHAUST THROTTLE VALVE
  • 683B-24562 AMAT 0190-12708  EXHAUST THROTTLE VALVE
  • 683B-26033  EXHAUST THROTTLE VALVE
  • T3BIA-27198 26711 O-RING  EXHAUST THROTTLE VALVE
  • HPS 162-0040K  INLINE PNEUMATIC VALVE
  • 152-0063P  ISOLATION VALVE
  • 99B-0558  ISOLATION VALVE
  • UHV-40-IKK-BVVN  ISOLATION VALVE
  • 100012730 MKS HPS Products 100012730  MAIN VALVE
  • SLOW PUMP VALVE  SLOW PUMP VALVE
  • L-40-SP1 KF40  TWO STAGE ANLE VALVE
  • V2-100  TWO STAGE ANLE VALVE
  • LPV-25-AK-COVS 10093771 (NW25)|ISOLATION VALVE  VACUUM VALVE
  • LPV-40-AK-COVS 100937702 (NW40)|ISOLATION VALVE  VACUUM VALVE
VARIAN

下記型式のバルブは全て定額修理対応可能です。

  • L9181301 NW16  ANGLE VALVE
  • NW80  ANGLE VALVE
  • L6281802 NW25  ANGLE VALVE
FUJI SEIKI

下記型式のバルブは全て定額修理対応可能です。

  • 1070903  APC VALVE
  • RSX-100J  BUTTERFLY VALVE
NOR-CAL

下記型式のバルブは全て定額修理対応可能です。

  • 22-2844 300mm Butterfly Valve  BUTTERFLY VALVE
  • ILVP-2002-NWB NW50  INLINE VALVE
  • 3870-01213 NW25  ISOLATION VALVE
  • 3870-01334 NW25  ISOLATION VALVE
  • 3870-01455 NW40  ISOLATION VALVE
  • ESVP-1002-NWB NW25  ISOLATION VALVE
  • 010125-1  PENDULUM VALVE
VAT

下記型式のバルブは全て定額修理対応可能です。

  • S61.1(61144-PA52)  BUTTERFLY VALVE
  • S61.2(61236-PAGC)  BUTTERFLY VALVE
  • Actuator with Controller 650| 651 Series Pressure Control Valve PHCG type only  CONTROLLER
  • PM-4 Remote control service box interface for S-64.0 and S-64.2  CONTROLLER
  • PM-5 Local and remote control for S-64.0 and S-64.2  CONTROLLER
  • PM-6 Remote control service box interface for S-61.0 and S-65.0  CONTROLLER
  • PM-7 Local and remote control for S-65.0 Pendulum valve  CONTROLLER
  • PM-7E Remote control service box interface for S-65.0 Pendulum valve  CONTROLLER
  • 1028  GATE VALVE
  • 1032 PNEUMATIC  GATE VALVE
  • 1032  GATE VALVE
  • 1034  GATE VALVE
  • 17432  GATE VALVE
  • 01034-KE24  GATE VALVE
  • 02110-BA24  GATE VALVE
  • 02110-BE24  GATE VALVE
  • 02112-BA24  GATE VALVE
  • 08040-FA44  GATE VALVE
  • 08140-FA44  GATE VALVE
  • 10844-PE44  GATE VALVE
  • 10846-CE24  GATE VALVE
  • 10846-UE24  GATE VALVE
  • 10846-XE28  GATE VALVE
  • 12040-FE24  GATE VALVE
  • 12040-PA24 AMAT 3870-02287  GATE VALVE
  • 12040-PA24 TxZ Turbo gate valve  GATE VALVE
  • 12044-PA24  GATE VALVE
  • 12046-PE24  GATE VALVE
  • 12048-PA44  GATE VALVE
  • 12144-PA24  GATE VALVE
  • 12148-PA44  GATE VALVE
  • 14036-PE24 ISO63  GATE VALVE
  • 14040-JE24  GATE VALVE
  • 14040-PE34  GATE VALVE
  • 14040-PE34-1005 HEATER  GATE VALVE
  • 14040-PE44  GATE VALVE
  • 14040-TE44  GATE VALVE
  • 14048-PE44  GATE VALVE
  • 64246-EX52 MOTOR ACTUATOR  GATE VALVE
  • 64246-PE52  GATE VALVE
  • 64246-UE52  GATE VALVE
  • N/A PNEUMATIC FOR IMPLANTER  GATE VALVE
  • S08 Series PNEUMATIC  GATE VALVE
  • S10 Series UHV GATE VALVE  GATE VALVE
  • S64 Series HV GATE VALVE  GATE VALVE
  • 16852-JA24 400mm  PENDULUM VALVE
  • 16852-JA28  PENDULUM VALVE
  • 65040-PA52-ACB1  PENDULUM VALVE
  • 65040-PA52-ACB2  PENDULUM VALVE
  • 65044-PH52  PENDULUM VALVE
  • 65044-PHHG  PENDULUM VALVE
  • 65046-PH52  PENDULUM VALVE
  • 65050-JH52  PENDULUM VALVE
  • S65.1  PENDULUM VALVE
  • S65.2  PENDULUM VALVE
  • PM-4  SERVICE BOX
  • PM-6  SERVICE BOX
  • PM-7E  SERVICE BOX
  • 0300X-CA24 VAT 0300X-CA24 Slit Valve|AMAT 3870-04338  SLIT VALVE
  • 0340X-MH24 For AMAT P500  SLIT VALVE
  • 0750X-UE24(CX0340)  SLIT VALVE
  • S012  SLIT VALVE
  • S02  SLIT VALVE
  • S0750 VAT S0750 Slit Valve (CX0340)  SLIT VALVE
  • S0750(CX0340)  SLIT VALVE
  • S07512  SLIT VALVE
  • P500 CHAMBER SLIT VALVE  SLIT VALVE
SMC

下記型式のバルブは全て定額修理対応可能です。

  • NCY2B40h-1900 Door cylinder  CYLINDER
  • XLA-160DA-M9BA  HIGH VACUUM VALVE
  • XLA-80DA SINGLE BELLOWS  HIGH VACUUM VALVE
  • XLD-100  HIGH VACUUM VALVE
  • XLD-100D-855  HIGH VACUUM VALVE
  • XLD-100D-862  HIGH VACUUM VALVE
  • XLD-40 DUAL BELLOWS  HIGH VACUUM VALVE
  • XLD-40  HIGH VACUUM VALVE
  • XLD-50  HIGH VACUUM VALVE
  • XLD-80  HIGH VACUUM VALVE
  • XYA-80  HIGH VACUUM VALVE
  • XMD-63-DL-M9  ISOLATION VALVE
  • CDRB1BW50-UIA980592 Super E Lifter Actuator|AMAT PN : 0520-01043  LIFT ARM ASSEMBLY
  • 02-121427-00 SMC 200mm L-motion Valve| 60-149991-00| CHAMBER  SLIT VALVE
  • 02-133793-00 SMC 200mm L-motion Valve| 60-133798-00| L/L  SLIT VALVE
  • XGT310-30-1A-X446  SLIT VALVE
  • SMC 300mm L-motion Valve  SLIT VALVE
AMAT

下記型式のバルブは全て定額修理対応可能です。

  • 0090-36275 FOR AMAT CVD  DPA REACTOR ASSEMBLY
  • 0090-36276 FOR AMAT CVD  DPA REACTOR ASSEMBLY
  • 3870-02881 AMAT 3870-02881 W 10inch gate valve  GATE VALVE
  • DH0190-01699 MOTOR TYPE: PK243A2A-SG36  HDP 200MM TURBO THROTTLE VALVE
  • 0010-08452 MOTOR TYPE: ASM46AK-T20  HDP 300MM TURBO THROTTLE VALVE
  • 0010-12457 MOTOR TYPE: ASM46AK-T20  HDP 300MM TURBO THROTTLE VALVE
  • 0010-29980 MOTOR TYPE: PK243A2A-SG36  HDP 300MM TURBO THROTTLE VALVE
  • 0010-29980 MOTOR TYPE: ASM46AK-T20  HDP 300MM TURBO THROTTLE VALVE
  • 0010-33875 MOTOR TYPE: ASM46AK-T20  HDP 300MM TURBO THROTTLE VALVE
  • DH0010-04235 MOTOR TYPE: PK243A2A-SG36  HDP 300MM TURBO THROTTLE VALVE
  • DH0010-29780 MOTOR TYPE: ASM46AK-T20  HDP 300MM TURBO THROTTLE VALVE
  • 0010-09340 AMAT P5001 CVD Wafer / Susceptor Lift Assembly  LIFT ARM ASSEMBLY
  • 0010-10033 AMAT P5000 CVD Wafer / Susceptor Lift Assembly  LIFT ARM ASSEMBLY
  • 0010-20753 AMAT Endura Wafer Lift  LIFT ARM ASSEMBLY
  • 0010-70271 AMAT ENDURA Heater Lift ( A101 )  LIFT ARM ASSEMBLY
  • 0100-13774 AMAT Wafer Lift  LIFT ARM ASSEMBLY
  • 0010-01360 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-01365 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-03051 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-06002 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-13368 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-13369 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-13970 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-14018 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-15287 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-20021 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-20664 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-26966 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-34370 AMAT ENDURA 300mm Slit Valve  SLIT VALVE
  • 0010-35105 AMAT 300mm Slit Valve (CH)  SLIT VALVE
  • 0010-70411 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-75035 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-75172 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-76392 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-76428 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0010-76482 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0020-20345 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • 0040-50505 AMAT 300mm Slit Valve (L/L)  SLIT VALVE
  • 0040-75862 AMAT Producer-II 200mm Slit Valve  SLIT VALVE
  • 3020-01052 AMAT ENDURA 200mm Slit Valve  SLIT VALVE
  • AMAT P5000 Chamber Slit Valve  SLIT VALVE
  • 0010-02142 P5000/5200 SACVD  THROTTLE VALVE
  • 0010-03070 MCVD 300mm Throttle Valve  THROTTLE VALVE
  • 0010-04711 AMAT MCVD  THROTTLE VALVE
  • 0010-09035 WxZ Throttle Valve  THROTTLE VALVE
  • 0010-09119 Etcher Butterfly Valve  THROTTLE VALVE
  • 0010-09402 P5000 PECVD THROTTLE VALVE
  • 0010-10009 DRIVE| HRTV ASSY  THROTTLE VALVE
  • 0010-10778 SACVD  THROTTLE VALVE
  • 0010-14682 200mm UPS 0010-09713 (SACVD)  THROTTLE VALVE
  • 0010-15321-004 eMAX 300mm Throttle Valve  THROTTLE VALVE
  • 0010-17151 300mm MCVD  THROTTLE VALVE
  • 0010-30135 DPS Metal Throttle  THROTTLE VALVE
  • 0010-36743-001 300mm Throttle Valve  THROTTLE VALVE
  • 0010-37163 DPS TV  THROTTLE VALVE
  • 0010-39645 DPS Poly Throttle  THROTTLE VALVE
  • 0010-76174 P5000 SACVD  THROTTLE VALVE
  • 0015-09077 MXP Butterfly Valve  THROTTLE VALVE
  • 0040-09032 WxZ Throttle Valve  THROTTLE VALVE
  • N/A Centura eMAX Etch Throttle Valve  THROTTLE VALVE
  • N/A DxZ Throttle Valve  THROTTLE VALVE
HVA

下記型式のバルブは全て定額修理対応可能です。

  • 11210-1201R-002 10INCH  GATE VALVE
  • 11214-0403RA  GATE VALVE
  • 21211-0609R-126S3 6INCH  GATE VALVE
  • HVA 21251-10032-001 HVA 300mm GATE VALVE  GATE VALVE
  • HVA 21251-1003Z  GATE VALVE
TAIYO

下記型式のバルブは全て定額修理対応可能です。

  • N/A  GATE VALVE
V-TEX

下記型式のバルブは全て定額修理対応可能です。

  • 06-014  GATE VALVE
  • P3 MODEL  GATE VALVE
  • VTEX 640x100 Load-lock Valve (LCD)  SLIT VALVE
  • VTEX 640x55 Chamber Valve (LCD)  SLIT VALVE
Motor Driver
YOKOGAWA
  • FAN IM-H8B60SFE919  FAN
  • M11C  MOTOR DRIVER
  • SD1100A02-2SN  MOTOR DRIVER
  • SR1015B62-3SN1C  MOTOR DRIVER
  • TM13001045-1SN-1C-00S0522  MOTOR DRIVER
  • TM13001045-2SND011019  MOTOR DRIVER
  • TM21001045  MOTOR DRIVER
  • UD1BG3  MOTOR DRIVER
  • DM1050A100  SERVO MOTOR
  • DM1100A00  SERVO MOTOR
  • DM1A-050G-1D2A4G2-031-0303-CE-Z  SERVO MOTOR
CKD
  • ABSODEX  MOTOR DRIVER
  • AX8150H  MOTOR DRIVER
  • AX9000GS  MOTOR DRIVER
  • AX900WGH  MOTOR DRIVER
  • AX9075S  MOTOR DRIVER
  • AX2018GS-DM15-P3  SERVO MOTOR
  • AX4075S  SERVO MOTOR
  • AX4150H  SERVO MOTOR
MITSUBISHI
  • A221AM-20  MOTOR DRIVER
  • BU158A351G53  MOTOR DRIVER
  • MDS-A-SVJ-10  MOTOR DRIVER
  • MDS-C1-V1-03  MOTOR DRIVER
  • MDS-C1-V2-0503  MOTOR DRIVER
  • MR-22S-100A  MOTOR DRIVER
  • MR-2J2S-350B-T004  MOTOR DRIVER
  • MR-E-20A  MOTOR DRIVER
  • MR-E-40A  MOTOR DRIVER
  • MR-H100A  MOTOR DRIVER
  • MR-H200A  MOTOR DRIVER
  • MR-H200B-S114-P53  MOTOR DRIVER
  • MR-H350-S114-P53  MOTOR DRIVER
  • MR-H40A  MOTOR DRIVER
  • MR-H500BN-H-UE  MOTOR DRIVER
  • MR-H60A  MOTOR DRIVER
  • MR-J100A  MOTOR DRIVER
  • MR-J10A  MOTOR DRIVER
  • MR-J2  MOTOR DRIVER
  • MR-J2-10B  MOTOR DRIVER
  • MR-J2-200A  MOTOR DRIVER
  • MR-J2-200A-XA59  MOTOR DRIVER
  • MR-J2-20A1  MOTOR DRIVER
  • MR-J2-20A-S12  MOTOR DRIVER
  • MR-J2-40A-XA59  MOTOR DRIVER
  • MR-J2-70B  MOTOR DRIVER
  • MR-J2M-10DU  MOTOR DRIVER
  • MR-J2M-BU4  MOTOR DRIVER
  • MR-J2M-BU8  MOTOR DRIVER
  • MR-J2M-P8B  MOTOR DRIVER
  • MR-J2S  MOTOR DRIVER
  • MR-J2S-100A-EG011  MOTOR DRIVER
  • MR-J2S-100A-S011  MOTOR DRIVER
  • MR-J2S-100B  MOTOR DRIVER
  • MR-J2S-10A  MOTOR DRIVER
  • MR-J2S-10A-S12  MOTOR DRIVER
  • MR-J2S-10B  MOTOR DRIVER
  • MR-J2S-10B-T004  MOTOR DRIVER
  • MR-J2S-11KB  MOTOR DRIVER
  • MR-J2S-200A-EG011  MOTOR DRIVER
  • MR-J2S-200A-EJ220  MOTOR DRIVER
  • MR-J2S-200A-S011  MOTOR DRIVER
  • MR-J2S-200A-XA59  MOTOR DRIVER
  • MR-J2S-200B  MOTOR DRIVER
  • MR-J2S-20A  MOTOR DRIVER
  • MR-J2S-20B  MOTOR DRIVER
  • MR-J2S-20B-S009U500  MOTOR DRIVER
  • MR-J2S-20B-T004  MOTOR DRIVER
  • MR-J2S-350A  MOTOR DRIVER
  • MR-J2S-350A4  MOTOR DRIVER
  • MR-J2S-350B  MOTOR DRIVER
  • MR-J2S-350B-EG126  MOTOR DRIVER
  • MR-J2S-350B-EG127  MOTOR DRIVER
  • MR-J2S-40A  MOTOR DRIVER
  • MR-J2S-40B  MOTOR DRIVER
  • MR-J2S-40B1-EH018  MOTOR DRIVER
  • MR-J2S-40B1-QA112  MOTOR DRIVER
  • MR-J2S-40B-EE006  MOTOR DRIVER
  • MR-J2S-40B-PZ009U652  MOTOR DRIVER
  • MR-J2S-500A  MOTOR DRIVER
  • MR-J2S-500A-EG055  MOTOR DRIVER
  • MR-J2S-500B  MOTOR DRIVER
  • MR-J2S-60CP-EG  MOTOR DRIVER
  • MR-J2S-70A  MOTOR DRIVER
  • MR-J2S-70B  MOTOR DRIVER
  • MR-J2S-70B-EE006  MOTOR DRIVER
  • MR-J2S-70B-EE085  MOTOR DRIVER
  • MR-J2S-70B-EG127  MOTOR DRIVER
  • MR-J2S-70B-T004  MOTOR DRIVER
  • MR-J2S-S175  MOTOR DRIVER
  • MR-J70MA  MOTOR DRIVER
  • MR-S0203P  MOTOR DRIVER
  • MR-SA102  MOTOR DRIVER
  • MR-SA152  MOTOR DRIVER
  • MR-SA202  MOTOR DRIVER
  • MR-SA22  MOTOR DRIVER
  • MR-SA33T  MOTOR DRIVER
  • MR-SA352R-S04  MOTOR DRIVER
  • MR-SA53  MOTOR DRIVER
  • MR-SC10  MOTOR DRIVER
  • MR-SC20  MOTOR DRIVER
  • MR-SC40  MOTOR DRIVER
  • MR-SO303P MOTOR DRIVER
  • MR-SO53P  MOTOR DRIVER
  • TN578A 61 BN  MOTOR DRIVER
  • 4514N9920E200  SERVO MOTOR
  • HA-43NC-SS  SERVO MOTOR
  • HA-FE13  SERVO MOTOR
  • HA-FE23  SERVO MOTOR
  • HA-FE23C  SERVO MOTOR
  • HA-FF33B  SERVO MOTOR
  • HA-FF38-S2  SERVO MOTOR
  • HA-FF43B  SERVO MOTOR
  • HA-FF43BG1  SERVO MOTOR
  • HA-FH13B  SERVO MOTOR
  • HA-FH55-S1  SERVO MOTOR
  • HA-FH55-UE-S2  SERVO MOTOR
  • HA-ME73K  SERVO MOTOR
  • HA-MH053B  SERVO MOTOR
  • HA-S0203002  SERVO MOTOR
  • HA-S03003  SERVO MOTOR
  • HA-S0403501  SERVO MOTOR
  • HA-S053003  SERVO MOTOR
  • HA-S053003S  SERVO MOTOR
  • HA-SC23GK  SERVO MOTOR
  • HA-SH52B-Y  SERVO MOTOR
  • HA-SH702  SERVO MOTOR
  • HC-KFS053  SERVO MOTOR
  • HC-KFS053G1K  SERVO MOTOR
  • HC-KFS13B  SERVO MOTOR
  • HC-KFS23K  SERVO MOTOR
  • HC-KFS410  SERVO MOTOR
  • HC-KFS43B  SERVO MOTOR
  • HC-KFS43BG1-S45  SERVO MOTOR
  • HC-KFS73BG1K  SERVO MOTOR
  • HC-MF053G2K  SERVO MOTOR
  • HC-MF13B  SERVO MOTOR
  • HC-MF13BG1  SERVO MOTOR
  • HC-MF23-UE  SERVO MOTOR
  • HC-MF43B  SERVO MOTOR
  • HC-MFS23B  SERVO MOTOR
  • HC-MFS43B  SERVO MOTOR
  • HC-MFS73G1  SERVO MOTOR
  • HC-MFS73-S23  SERVO MOTOR
  • HC-PQ13-UE  SERVO MOTOR
  • HC-PQ43K  SERVO MOTOR
  • HC-RFS103  SERVO MOTOR
  • HC-RFS203BK  SERVO MOTOR
  • HC-SF152-S4  SERVO MOTOR
  • HC-SF301B  SERVO MOTOR
  • HC-SFS202G1-S2  SERVO MOTOR
  • HC-SFS352B  SERVO MOTOR
  • HC-SFS353  SERVO MOTOR
  • HC-SWS133B  SERVO MOTOR
  • HC-UF13K-S8  SERVO MOTOR
  • HC-UFS13BK-S11  SERVO MOTOR
  • HF-SP152B  SERVO MOTOR
  • MFS13-S13  SERVO MOTOR
  • MMD020EBBB  SERVO MOTOR
  • S02203  SERVO MOTOR
  • MR-SD20 Servo Driver  SERVO MOTOR
OMRON
  • 3F88M-115M  MOTOR DRIVER
  • R88D-HL04  MOTOR DRIVER
  • R88D-HS04  MOTOR DRIVER
  • R88D-HS10  MOTOR DRIVER
  • R88M-UA12LA  MOTOR DRIVER
  • R88M-E08030-B10S1  SERVO MOTOR
  • R88M-H20030-B  SERVO MOTOR
  • R88M-R1K130  SERVO MOTOR
  • R88M-UE75030H-S1  SERVO MOTOR
  • R88M-WP20030H-B  SERVO MOTOR
  • U75030TA-B  SERVO MOTOR
VEXTA
  • AID150A-C  MOTOR DRIVER
  • ASD12A-S  MOTOR DRIVER
  • ASD13A-A  MOTOR DRIVER
  • ASD16D-C  MOTOR DRIVER
  • BLD50A-F  MOTOR DRIVER
  • K0728-D  MOTOR DRIVER
  • UDK5114N  MOTOR DRIVER
  • UDK5128NA-1  MOTOR DRIVER
  • UDX5114  MOTOR DRIVER
  • A3723-9215  SERVO MOTOR
  • A4313-9215ME  SERVO MOTOR
  • A4564-9215GME  SERVO MOTOR
  • A5820-9015KE  SERVO MOTOR
  • A6742-9015KHGE  SERVO MOTOR
  • EM596-NAE-A2  SERVO MOTOR
  • FEXM5400-DM  SERVO MOTOR
  • KBLM460GD-CM  SERVO MOTOR
  • KBLM5120GD-AM  SERVO MOTOR
  • KBLM-6180CM  SERVO MOTOR
  • PH268  SERVO MOTOR
  • PK243A1-SG18  SERVO MOTOR
YASKAWA
  • ADE-4C1C  MOTOR DRIVER
  • ADE-4C2C  MOTOR DRIVER
  • CACR-0101-NQ1C  MOTOR DRIVER
  • CACR-01-DS3BUC  MOTOR DRIVER
  • CACR-02-TE1K  MOTOR DRIVER
  • CACR-2-TE3BUC  MOTOR DRIVER
  • CACR-HR05BAB12  MOTOR DRIVER
  • CACR-PR01AC4ER  MOTOR DRIVER
  • CACR-PR07AC3FSY42  MOTOR DRIVER
  • CLSR-1B-N2CB  MOTOR DRIVER
  • CLSR-33-N2CD  MOTOR DRIVER
  • CLSR-33-N2CE  MOTOR DRIVER
  • CLSR-42-N2CA  MOTOR DRIVER
  • CPCR-0101-NQ1C  MOTOR DRIVER
  • DDCVR-CR1041  MOTOR DRIVER
  • DGDM-20AC-SD2  MOTOR DRIVER
  • DGDP-08AP  MOTOR DRIVER
  • DR2-03BDY111  MOTOR DRIVER
  • JUSP-NS310  MOTOR DRIVER
  • SGDA SERIES  MOTOR DRIVER
  • SGDA-A5APY38A  MOTOR DRIVER
  • SGDA-A5BS  MOTOR DRIVER
  • SGDB-1EADGY156  MOTOR DRIVER
  • SGDB-44ADG  MOTOR DRIVER
  • SGDD-02AG4A  MOTOR DRIVER
  • SGDG-01GTY21  MOTOR DRIVER
  • SGDJ SEIRES  MOTOR DRIVER
  • SGDM SERIES  MOTOR DRIVER
  • SGDS SERIES  MOTOR DRIVER
  • SMC 2000-8DM  MOTOR DRIVER
  • SR1100A02-2SN1C97S0018  MOTOR DRIVER
  • XD-08MN0A  MOTOR DRIVER
  • MFA030HA2NSB  SERVO MOTOR
  • R02MA-AK93  SERVO MOTOR
  • R02SAKAOE  SERVO MOTOR
  • R04M-AL21  SERVO MOTOR
  • SGM-01A312B  SERVO MOTOR
  • SGM-01A3SU31  SERVO MOTOR
  • SGM-01U3B4CL  SERVO MOTOR
  • SGM-02A3G2P  SERVO MOTOR
  • SGM-02A3SU21  SERVO MOTOR
  • SGM-08A3G14B  SERVO MOTOR
  • SGM-08A3J16  SERVO MOTOR
  • SGM-08A3TE11  SERVO MOTOR
  • SGM-08AAFJ12  SERVO MOTOR
  • SGM-A3B314P  SERVO MOTOR
  • SGM-A3B3G44P  SERVO MOTOR
  • SGM-A3B5SW11  SERVO MOTOR
  • SGM-A3BWJ46  SERVO MOTOR
  • SGM-A5A3G34  SERVO MOTOR
  • SGM-A5B314CP  SERVO MOTOR
  • SGM-A5CWYB11  SERVO MOTOR
  • SGM-A5V3G30B  SERVO MOTOR
  • SGMAH-01AAF41  SERVO MOTOR
  • SGMAH-02AAA4C  SERVO MOTOR
  • SGMAH-04AAA41  SERVO MOTOR
  • SGMAH-04AAA-SL11  SERVO MOTOR
  • SGMAH-08A1A21  SERVO MOTOR
  • SGMAS-01A2A2C  SERVO MOTOR
  • SGMAS-01ACA61  SERVO MOTOR
  • SGMAS-01ACABC  SERVO MOTOR
  • SGMAS-02A2A21  SERVO MOTOR
  • SGMAS-08A2A2B  SERVO MOTOR
  • SGMAS-08ACA21  SERVO MOTOR
  • SGMAS-08ACAH761  SERVO MOTOR
  • SGMAS-12ABA-TE11  SERVO MOTOR
  • SGMAS-12ABA-TE12  SERVO MOTOR
  • SGMAS-A5A2A21  SERVO MOTOR
  • SGMAS-A5ACAB1  SERVO MOTOR
  • SGMAS-C2A2A21  SERVO MOTOR
  • SGMB-2BA2W-TE11  SERVO MOTOR
  • SGMDH-06A1A-YR13  SERVO MOTOR
  • SGMDH-06A2A-YR13  SERVO MOTOR
  • SGMDH-22A2A-YR13  SERVO MOTOR
  • SGMDH-22A2A-YR14  SERVO MOTOR
  • SGME-04AF12  SERVO MOTOR
  • SGMG-09A2AB  SERVO MOTOR
  • SGMG-13A2ABB  SERVO MOTOR
  • SGMG-13B2AS-TW4  SERVO MOTOR
  • SGMG-1AA2AC  SERVO MOTOR
  • SGMG-20A2A-TW11  SERVO MOTOR
  • SGMG-44A2A-TW11  SERVO MOTOR
  • SGMG-44A2BAB  SERVO MOTOR
  • SGMG-75A2AL  SERVO MOTOR
  • SGMG-75AWV-TK11  SERVO MOTOR
  • SGMG-75V6V-FJ11  SERVO MOTOR
  • SGMGH-12A2A-YR13  SERVO MOTOR
  • SGMGH-1EP2A-TW11  SERVO MOTOR
  • SGMGH-20ACA-FJ21  SERVO MOTOR
  • SGMGH-20ACAL-TE1  SERVO MOTOR
  • SGMGH-30A2A-YR35  SERVO MOTOR
  • SGMGH-55A2A-YR14  SERVO MOTOR
  • SGMGH-75ACA61  SERVO MOTOR
  • SGML-04AF14  SERVO MOTOR
  • SGMM-A2C313  SERVO MOTOR
  • SGMP-04A314  SERVO MOTOR
  • SGMP-04A3TE51  SERVO MOTOR
  • SGMP-08A3TE31  SERVO MOTOR
  • SGMP-08ATE41  SERVO MOTOR
  • SGMP-15A3TE11  SERVO MOTOR
  • SGMPH-01AAA21  SERVO MOTOR
  • SGMPH-01BAAJ32C  SERVO MOTOR
  • SGMPH-04A1A-TE31  SERVO MOTOR
  • SGMPH-04A1A-YR12  SERVO MOTOR
  • SGMPH-04AAE41D  SERVO MOTOR
  • SGMPH-08A1A-YR12  SERVO MOTOR
  • SGMPH-08AAA41  SERVO MOTOR
  • SGMPH-15A1A-YR11  SERVO MOTOR
  • SGMPH-15AAA2C  SERVO MOTOR
  • SGMPH-15AAA-TE21  SERVO MOTOR
  • SGMPS-15A2A6E-E  SERVO MOTOR
  • SGMRS-75A2A-YR21  SERVO MOTOR
  • SGMS-20ASB  SERVO MOTOR
  • SGMS-30A6A-AM22  SERVO MOTOR
  • SGMS-50A6AB  SERVO MOTOR
  • SGMSH-20ACA-FJ21  SERVO MOTOR
  • SGMSH-20ACA-TL31  SERVO MOTOR
  • SGMSH-30ACA21  SERVO MOTOR
  • UGFMED-A5TGR34  SERVO MOTOR
  • UGQMEM-01SNQ22  SERVO MOTOR
  • UGQMEM-01SNQ71  SERVO MOTOR
  • UGQMEM-02MAC  SERVO MOTOR
  • UGQMEM-02MNQ22  SERVO MOTOR
  • UGQMEM-02MNQ41  SERVO MOTOR
  • UGQMEM-04MNQ12  SERVO MOTOR
  • UGQMEM-06MNQ12  SERVO MOTOR
  • UGQMEM-06-SW51  SERVO MOTOR
  • UGQMEN-02MNQ23  SERVO MOTOR
  • UGQMEN-04MNQ31  SERVO MOTOR
  • USADED-22E22K  SERVO MOTOR
  • USADEM-45-TW11  SERVO MOTOR
  • USAFED-30CA2X  SERVO MOTOR
  • USAHEM-02BF2  SERVO MOTOR
  • USAHEM-02TE16  SERVO MOTOR
  • USAHEM-02TE18  SERVO MOTOR
  • USAHEM-02-TE19  SERVO MOTOR
  • USAHEM-02-TE31  SERVO MOTOR
  • USAHEM-02-TE53  SERVO MOTOR
  • USAHEM-03DS31  SERVO MOTOR
  • USAHEM-03SL11  SERVO MOTOR
  • USAHEM-03TE25  SERVO MOTOR
  • USAMED-03MA1SE  SERVO MOTOR
  • USA-REM-03E2K  SERVO MOTOR
  • USAREM-05CSL2LB  SERVO MOTOR
  • USAREM-A5DTE12  SERVO MOTOR
  • USASEM-50FJ12  SERVO MOTOR
  • WEIA-I  SERVO MOTOR
  • SGDH-01AE Y901A 1P1X / 4W1136-1-37
BALDOR
  • BSM100C-3150AA  SERVO MOTOR
  • BSM1R-702.12112302  SERVO MOTOR
  • BSM4F5-75-B14-A25  SERVO MOTOR
  • BSM63A-138-SPECIAL  SERVO MOTOR
  • BSM80B-175AA  SERVO MOTOR
  • BSM80C-375AA  SERVO MOTOR
  • S2P102W002G1  SERVO MOTOR
  • W040.1189  SERVO MOTOR
  • W040.1246D12131400  SERVO MOTOR
  • W077.139220612 D121 124 02  SERVO MOTOR
VARIAN
  • E19014200 SERVO MOTOR
LAM
  • INR-244-647C SMC Heat Exchanger
  • USAREM−A5DTE12
Baratron
MKS
  • 122
  • 127
  • 622
  • 626
  • 624A
  • 625A
  • 627A
  • 627B
  • 628A
  • 628B
  • 629A
  • 629B
Massflow Controller
AERA

下記型式のマスフロコントローラは全て定額修理対応可能です。

  • 7700
  • 7800
  • FC-770 SERIES
  • FC-773C
  • FC-780 SERIES
  • FC-8710D
  • FC-D980C SERIES
  • FC-PA780 SERIES
MKS

下記型式のマスフロコントローラは全て定額修理対応可能です。

  • 1179
TYLAN

下記型式のマスフロコントローラは全て定額修理対応可能です。

  • 2900 SERIES
UNIT

下記型式のマスフロコントローラは全て定額修理対応可能です。

  • 1100
  • 1600
  • 8100
  • 8160
  • 1200A
ESC
AMAT

下記型式のESCは全て再生可能です。

  • 0010-06875 200mm MCA Puck ESC Pink Color Endura ESC
  • 0010-34561 200mm MCA Puck ESC Pink Color Endura ESC
  • 0200-06584 201mm MCA Puck ESC Pink Color Endura ESC
  • 0200-76086 202mm MCA Puck ESC Pink Color Endura ESC
  • 0200-76086 203mm MCA Puck ESC Pink Color Endura ESC
  • 15-270165-00 300mm Novellus Inova Double Gap Semco ESC ESC
  • 0010-01166 200mmm MCA Heater HEATER
  • 0010-01286 200mmm MCA Heater HEATER
  • 0010-01625 200mmm MCA Heater HEATER
  • 0010-01925 200mmm MCA Heater HEATER
  • 0010-02342 200mm DxZ Ceramic Heater HEATER
  • 0010-02461 201mm DxZ Ceramic Heater HEATER
  • 0010-02467 202mm DxZ Ceramic Heater HEATER
  • 0010-03030 200mmm MCA Heater HEATER
  • 0010-03254 200mmm MCA Heater HEATER
  • 0010-03287 200mm Producer Certura Heater HEATER
  • 0010-03840 200mm Producer Certura Heater HEATER
  • 0010-03841 200mm Producer Certura Heater HEATER
  • 0010-04448 200mmm MCA Heater HEATER
  • 0010-04450 200mmm MCA Heater HEATER
  • 0010-04978 300mm Producer Cer. Heater HEATER
  • 0010-05030 200mm Dual Zone Ceramic Heater HEATER
  • 0010-06205 200mmm MCA Heater HEATER
  • 0010-06825 203mm DxZ Ceramic Heater HEATER
  • 0010-07815 300mmm MCA Heater HEATER
  • 0010-08265 300mm Producer Cer. Heater HEATER
  • 0010-08605 300mm Producer Cer. Heater HEATER
  • 0010-08901 200mm Producer Certura Heater HEATER
  • 0010-11681 300mm Producer Cer. Heater HEATER
  • 0010-11908 300mm Producer Cer. Heater HEATER
  • 0010-12282 200mm Producer Certura Heater HEATER
  • 0010-12814 200mm Dual Zone Ceramic Heater HEATER
  • 0010-13314 200mmm MCA Heater HEATER
  • 0010-13895 200mmm MCA Heater HEATER
  • 0010-15961 200mmm MCA Heater HEATER
  • 0010-17871 200mm Producer Certura Heater HEATER
  • 0010-21839 200mmm MCA Heater HEATER
  • 0010-21840 200mmm MCA Heater HEATER
  • 0010-22134 300mmm MCA Heater HEATER
  • 0010-22166 200mmm MCA Heater HEATER
  • 0010-22180 200mmm MCA Heater HEATER
  • 0010-22184 300mmm MCA Heater HEATER
  • 0010-22186 200mmm MCA Heater HEATER
  • 0010-22988 300mmm MCA Heater HEATER
  • 0010-23014 300mm Producer Cer. Heater HEATER
  • 0010-23066 300mmm MCA Heater HEATER
  • 0010-23068 300mmm MCA Heater HEATER
  • 0010-23794 300mm Producer Cer. Heater HEATER
  • 0010-24189 300mm Producer Cer. Heater HEATER
  • 0010-24300 300mm Producer Cer. Heater HEATER
  • 0010-24367 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0010-24685 300mm Producer Cer. Heater HEATER
  • 0010-25323 200mm Producer Certura Heater HEATER
  • 0010-25415 200mm Producer Certura Heater HEATER
  • 0010-25416 300mm Producer Cer. Heater HEATER
  • 0010-27430 300mmm MCA Heater HEATER
  • 0010-28081 300mm Producer Cer. Heater HEATER
  • 0010-29128 300mm Producer Cer. Heater HEATER
  • 0010-29675 200mm Producer Certura Heater HEATER
  • 0010-30838 300mm Producer Cer. Heater HEATER
  • 0010-31708 300mm Producer Cer. Heater HEATER
  • 0010-31709 300mm Producer Cer. Heater HEATER
  • 0010-31724 300mm Producer Cer. Heater HEATER
  • 0010-31871 300mm Producer Cer. Heater HEATER
  • 0010-31879 300mm Producer Cer. Heater HEATER
  • 0010-31987 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0010-33992 HEATER
  • 0010-36734 300mm Producer Cer. Heater HEATER
  • 0010-36736 300mm Producer Cer. Heater HEATER
  • 0010-36738 300mm Producer Cer. Heater HEATER
  • 0010-36740 300mm Producer Cer. Heater HEATER
  • 0020-23478 200mmm MCA Heater HEATER
  • 0040-02408 204mm DxZ Ceramic Heater HEATER
  • 0040-02450 205mm DxZ Ceramic Heater HEATER
  • 0040-02539 206mm DxZ Ceramic Heater HEATER
  • 0040-04048 300mm Producer Cer. Heater HEATER
  • 0040-07024 300mm Producer Cer. Heater HEATER
  • 0040-07033 300mm Producer Cer. Heater HEATER
  • 0040-07953 200mm Dual Zone Ceramic Heater HEATER
  • 0040-33788 200mm Dual Zone Ceramic Heater HEATER
  • 0040-36383 207mm DxZ Ceramic Heater HEATER
  • 0040-37010 208mm DxZ Ceramic Heater HEATER
  • 0040-37593 209mm DxZ Ceramic Heater HEATER
  • 0040-38097 210mm DxZ Ceramic Heater HEATER
  • 0040-40508 211mm DxZ Ceramic Heater HEATER
  • 0040-42700 212mm DxZ Ceramic Heater HEATER
  • 0040-44585 300mm Producer Cer. Heater HEATER
  • 0040-45008 200mm Producer Certura Heater HEATER
  • 0040-47318 200mm Producer Certura Heater HEATER
  • 0040-49020 300mm Producer Cer. Heater HEATER
  • 0040-51612 200mm Producer Certura Heater HEATER
  • 0040-53976 300mm Producer Cer. Heater HEATER
  • 0040-61269 200mm Producer Certura Heater HEATER
  • 0040-61269 213mm DxZ Ceramic Heater HEATER
  • 0040-70479 200mm Producer Certura Heater HEATER
  • 0040-70479 214mm DxZ Ceramic Heater HEATER
  • 0040-82421 300mm Producer Cer. Heater HEATER
  • 0040-84051 300mm Producer Cer. Heater HEATER
  • 0040-85475 300mm Producer Cer. Heater HEATER
  • 0040-86263 200mm Producer Certura Heater HEATER
  • 0040-88188 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0040-MF612 200mm Producer Certura Heater HEATER
  • 0041-01652 300mm Producer Cer. Heater HEATER
  • 0041-04679 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0041-08919 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0190-00381 200mmm MCA Heater HEATER
  • 0190-03501 200mm Producer Certura Heater HEATER
  • 0190-03516 215mm DxZ Ceramic Heater HEATER
  • 0190-05083 300mm Producer Cer. Heater HEATER
  • 0190-21581 200mmm MCA Heater HEATER
  • 0190-21597 200mmm MCA Heater HEATER
  • 0190-21758 200mmm MCA Heater HEATER
  • 0190-21764 200mmm MCA Heater HEATER
  • 0200-200MC 200mm Producer Certura Heater HEATER
  • 0200-35527 200mm Producer Certura Heater HEATER
  • 0200-37359 200mm Producer Certura Heater HEATER
  • PAA63395 200mm Producer Certura Heater HEATER
  • 0040-48594 "ULTIMA ESC 12"" HDP Ultima ESC"
  • 0040-18219 "ULTIMA ESC 8"" HDP Ultima ESC"
  • 0040-18208 "ULTIMA ESC 8"" HDP Ultima ESC"
  • 0010-01166 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-01167 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-01196 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-17812 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-17831 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-01288 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-01926 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-03028 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-03361 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-04451 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0010-04452 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-13313 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-13897 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-21836 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-21946 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-22167 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-22408 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-22411 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0190-00382 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-21442 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-21443 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-21759 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-22094 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0010-04448 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-04450 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-08017 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-08750 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-12516 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0040-05493 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0040-40979 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0040-40981 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0040-70250 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0010-05994 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0010-05995 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0010-06229 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-00876 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-04951 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-05370 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-40978 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-40980 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-43558 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-44645 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0010-06788 DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)
  • 0010-30277 DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)
  • 0190-23942 DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)
  • 0010-33416 AMAT ESC 300mm AMAT ESC Assy
  • 0041-06414 AMAT ESC 300mm AMAT ESC Assy
  • 0041-07781 AMAT ESC 300mm AMAT ESC Assy
  • 0010-03773 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-03774 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-06874 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-07815 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-11343 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-14204 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-15431 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-16109 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-16858 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-16986 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-17111 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-19971 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-20746 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0010-22134 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-22183 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0010-22184 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-22985 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-22988 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-23066 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-23068 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-23677 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-23803 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-24076 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-24356 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-24358 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-24456 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-27430 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-27431 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-27983 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-29710 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0020-0882  MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0021-22182 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-23068 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-23680 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-48399 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-70754 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-33215 ULTIMA ESC 300mm Dual HE HDPCVD ESC
  • 0040-49504 E-MAX ESC 300mm E-Max Ceramic ESC Assy
  • 0040-49519 E-MAX ESC 300mm E-Max Ceramic ESC Assy
  • 0200-02936 "MCA ESC 300mm Endura Puck Assy
  • 0010-54667 MCA ESC 300mmm AMAT MCA E-Chuck Assy
  • 0041-26722 AMAT ESC 300mm AMAT ESC Assy
  • 0041-26723 AMAT ESC 300mm AMAT ESC Assy
  • 0040-81673 AMAT ESC 300mm AMAT ESC Assy
  • 0040-53718 AMAT ESC 300mm AMAT ESC Assy
  • 0040-81674 AMAT ESC 300mm AMAT ESC Assy
  • 0040-02987 "ULTIMA ESC 300MM DUAL HE
各装置メーカーパーツ
AMAT
  • 0010-06264 THROTTLE VALVE LOWER DPS 200mm
  • 0010-09933 DPS HV MODULE DPS 200mm
  • 0010-09968 THROTTLE VALVE UPPER Super E 200mm
  • 0010-10556 DETECTOR|EDP MONOCHROMATOR (P-5000) P5000 200mm
  • 0010-10901 MXP HV MODULE(ESC) DPS 200mm
  • 0010-10973 0010-10973 ESC POWER SUPPLY All 200mm
  • 0010-10973 HOT PACK P/N:0010-10973 Super E/MXP 200mm
  • 0010-13124 5 PHASE DRIVER DPS 200mm
  • 0010-20021 SLIT VALVE TS:30073629 DPS 200mm
  • 0010-39867 SUPER E HV MODULE(HVMODULE ASSY POSITIVE CESC) Super E 200mm
  • 0020-21699 ORIENTER LASER TUBE ASSY All 200mm
  • 0090-00224 I/O EXPANSION CARD P/N:0090-00224 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-03467 0090-03467| SYNERGY V452 SBC For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-76110 SBC BOARD TS:30003408 (0090-76110) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-76133 SBC BOARD TS:30029760 (P/N:0090-76133) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-90967 DAQ TYPE H PW SUPPLY FOR QUANTUM For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0090-91938 Arc Control DSP BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00011 CHOPPER DRIVER BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00223 PCB WH I/F MBC AMPLIFIER For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00396 PCB ASSY ANALOG INPUT/OUTPUT(0100-00396)(Centura) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00426 INTERLOACK BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00782 PCB ASSY ALNALOG INPUT For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-00957 STEEPER CONTROL BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-01130 CCD BOARD REPAIR (30000896R1) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-01894 AO BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-01996 ASSY PCB SEISEI BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-02735 VGA BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09009 BUFFER I/O BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09054 A I/O BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09172 EIGHT CHANNEL EMISSION/LASER ENDPOINT BD DPS 200mm
  • 0100-09196 ESC CONTROL BOARD(P/N:0100-38032 ) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09204 H2O VDSII CONTROLLER BOARD TS :30003433 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09222 CHAMBER INTERFACE BD FOR DPS CENTURA P/N:0100-09222 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-09389 TC AMP INTERLOCK BOARD REPAIR (WxZ red bin) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-11002 DI / DO BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20001 SEI BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20007 Pneumatuc distribution board repair For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20068 CCD BOARD (30074095R1) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20068 PCB ASSY CCD (30074095R1) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-20084 CENTURA|0100-20084 MFC INTERCONNECT BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35054 CENTURA|0100-35054 CHAMBER INTERCONNECT BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35054 CHAMBER INTERFACE BD P/N:0100-35054 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35173 SERIIPLEX POWER DISTRIBUTION BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-35185 LAMP FAILURE LED BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-76124 PCB DIGITAL I/O (DI/O BOARD) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-76259 WAFER ORIENTER PCB BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0100-99011 GAS INTERLOCK BOARD FOR QUANTUM For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-09379 WPCB ASSY| VME CPU SYNERGY UPGRADE(P/N:0190-09379) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-09688 CENTURA| SERIPLEX BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-09769 MAGNETRON HEAD DPS 200mm
  • 0190-09939 OMS BOARD REPAIR For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-13065 VGA BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-13175 LIGHT PEN All 200mm
  • 0190-35650 SERIPLEX CONTROL BUS ASSY BD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0190-70060 W MAGNET DRIVER ASSY P5001/Super E /MXP/DPS 200mm
  • 0190-76005 OMS BOARD (P/N:0190-76005) For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 0660-00221 THERMALOGIC BOARD REPAIR TS:30028349 For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • 3750-01106 SMART MATCHING ASSY DPS 200mm
  • 9700-4282-01 INDEXER CONTROL BOARD For all Applied Tool(Etch/T/CVD/PVD) 200mm
  • BLD424-5 BRUSHLESS DC MOTOR DRIVER FOR ENDURA P/N:1080-01190 Endura 200mm
  • N/A CENTURA LOADLOCK INDEXER OVERHAUL All 200mm
  • N/A DETECTOR|EDP MONOCHROMATOR(CENTURA) DPS 200mm
  • N/A CENTURA| MAGNET DRIVER(AMAT) DPS 200mm
  • N/A Bearing ASSY P5000/Super E /MXP/DPS 200mm
  • N/A ACTR RTRY 180DEG 50MMBORE W/AUTO SW & Super E 200mm
NOVELLUS
  • 02-00093-00 ASSY| ONE-ARM ROBOT
  • 16-144643-00 Novellus Pedestal Lifter|300MM
  • 19-100586-00 Novellus Bellow| Pedestal Cylinder|300MM
  • 16-128855-00 Novellus Bellow| Argon Dump|300MM
  • 60-680027-00 Novellus ISO Valve (MDC)|200MM/300MM
  • 27-00082-00
  • 27-00117-00
LAM
  • 853-012123-001 ASSY ARM DRIVE
  • 853-031776-001 PADDLE LIFT ASSY
  • 853-012123-00X LAM Harmonic Arm Driver Assy|150MM/200MM
  • 853-032776-002 Lam TCP-9600 Paddle Lift|150MM
  • 853-012200-00X LAM Inner Gate Assy|150MM/200MM
  • 853-013542-002 LAM 4xxx ISO Valve|150MM/200MM
  • 853-013521-001 LAM 4xxx ISO Valve|150MM/200MM
  • 853-360073-001 LAM 9400 Turbo Bypass Valve|150MM/200MM
  • 853-032983-001 LAM 9400 Turbo ISO Valve|150MM/200MM
  • 853-032123-002 LAM ISO Valve| DSQ Chamber|150MM/200MM
Ceramic Heater
TEL
  • PAA55405 Trias heater
  • PAA58505 Trias heater
  • PAA54745 Trias heater
  • PAA61865 Trias heater
  • PAA57835 Trias heater
  • PAA44565 Trias heater
  • PAA66205 Trias heater
  • PAA64445 Trias heater
  • PAA58735 Trias heater
  • PAA54775 Trias heater
  • PAA61868 Trias heater
  • PAA61869 Trias heater
  • PAA58005 Trias heater
  • P4458505 Trias heater
  • PAA66202 Trias heater
AMAT
  • 0010-04421
  • 0010-04483
  • 0010-10252
  • 0040-08621
  • 0040-08803
  • 0040-46818
  • 0010-01933
  • 0010-36631
  • 0040-02149
  • 0040-32712
  • 0010-03843
  • 0040-00939
  • 0040-36219
  • 0040-37010
  • 0040-40699
  • 0010-02342
  • 0010-02461
  • 0010-02467
  • 0040-02408
  • 0040-02538
  • 0040-36383
  • 0040-38097
  • 0040-40508
  • 0040-61269
  • 0040-70479
  • 0190-03516
  • 0010-06825
  • 0040-02450
  • 0040-42700
  • PAA97325
  • PAZ01521F0
  • 0010-31879
  • 0010-36736
  • 0010-08621
  • 0010-12118
  • 0010-31396
  • 0010-44753
  • 0040-42451
  • 0041-04789
  • 0041-32489
  • 0010-07938
  • 0010-08167
  • 0010-12813
  • 0010-13459
  • 0010-16893
  • 0040-40635
  • 0195-01037
  • 0195-01314
  • 0010-53618
  • 0010-04461
  • 0010-06598
  • 0010-07042
  • 0010-08265
  • 0010-08605
  • 0010-11681
  • 0010-11908
  • 0010-23014
  • 0010-23794
  • 0010-24189
  • 0010-24299
  • 0010-24300
  • 0010-24685
  • 0010-25416
  • 0010-28081
  • 0010-29128
  • 0010-30838
  • 0010-31708
  • 0010-31709
  • 0010-31724
  • 0010-31871
  • 0010-34715
  • 0010-36734
  • 0040-04048
  • 0040-07024
  • 0040-07031
  • 0040-07033
  • 0040-42270
  • 0040-44585
  • 0040-49020
  • 0040-53976
  • 0040-82041
  • 0040-82421
  • 0040-84051
  • 0040-84715
  • 0040-85475
  • 0040-85725
  • 0040-89894
  • 0041-01652
  • 0041-10493
  • 0190-05083
  • 0010-45448
  • 0041-33896
  • 0010-14007
  • 0010-14700
  • 0010-24367
  • 0010-26264
  • 0010-29443
  • 0010-30987
  • 0010-31987
  • 0010-33992
  • 0040-08529
  • 0040-34698
  • 0040-54449
  • 0040-60524
  • 0040-83188
  • 0040-88097
  • 0040-96583
  • 0041-04679
  • 0041-08919
  • 0041-49879
  • 31LS-100A
  • ESD80-002282-11
  • PAA68245
  • 0010-31581
  • 0190-35615
  • 0190-01167
  • 0190-00397
  • 0190-01168
  • 0190-35986
  • 0190-05406
  • 3M87-036569-11
  • 0190-05807
  • 0190-01894
  • 0190-36078
  • 0010-48841 300mm AMAT Producer Cer. Heater
  • 0195-02970 300mm AMAT Dual Zone Ceramic Heater
  • 0041-32919 300mm AMAT Producer DZ Heater
Jacket Heater
AMAT
  • 0190-23502 / Weld Ment TEE-KF40 Silicone rubber heater
  • 0195-00218 / WCSH-0240-0000 Silicone rubber heater
  • 0190-23500 Piping heater LI-9496 Balzers Valve Assy.
  • 0190-23502 Piping heater LI-9497 Balzers Valve Assy.
  • 0190-23503 Piping heater LI-9498 Balzers Valve Assy.
  • 0190-33740 Piping heater LI-9499 Balzers Valve Assy.
TEL
  • 3843-000056-11 Bottom Heater
  • 3843-000082-11
  • 3843-000077-11
  • 2110-332647-11
  • 3810-320709-12 Panel Heater
  • 3810-323572-14 Panel Heater
  • 3810-323605-12 Panel Heater
  • 3810-323647-11 Panel Heater
  • 3810-323672-14 Panel Heater
  • 3810-324201-12 Panel Heater
  • 3810-324849-11 Panel Heater
  • 3810-324924-11 Panel Heater
  • 3810-325153-12 Panel Heater
  • 3810-325907-11 Panel Heater
  • 3810-329508-11 Panel Heater
  • 3810-331978-11 Panel Heater
  • 3810-331979-11 Panel Heater
  • 5110-300341-11 Panel Heater
  • 2110-348523-12 Panel Heater
  • 2110-348936-12 Panel Heater
  • 2110-350260-11 Panel Heater
  • 2110-352200-11 Panel Heater
  • 2110-353115-12 Panel Heater
  • 2110-360949-11 Panel Heater
  • 2110-362562-11 Panel Heater
  • 2110-364768-12 Panel Heater
  • 2110-364976-11 Panel Heater
  • 2110-365679-11 Panel Heater
  • 2110-382562-11 Panel Heater
  • 2110-348521-12 Panel Heater
NICHIAS
  • W1-0459265-02
  • W1-0470562
JALN/Al203 Heater
NOVELLUS
  • 02-146672-00 Pedestal heater
  • 02-264308-00 Pedestal heater
  • 02-264309-00 Pedestal heater
  • 02-355935-00 Pedestal heater
  • 02-355937-00 Pedestal heater
  • 02-364187-00 Pedestal heater
  • 02-373416-00 Pedestal heater
  • 02-033920-00 Pedestal heater
  • 02-033134-01 Pedestal heater
  • 02-033134-00 Pedestal heater
  • 02-292391-00 Pedestal heater
  • 02-282384-00 Pedestal heater
  • 02-033134-02 Pedestal heater
Chamber Parts
AMAT
  • 0040-92487
  • 0020-33806
  • 0200-39296
  • 0200-35956
  • 0021-09550
  • 0020-09552
  • 0200-10377
  • 0021-01421
  • 0200-00137
  • 0200-10324
  • 0021-09552
  • 0040-87958-004
  • 0040-37642 LINER UPPER THICK Y2O3 COATING 300MM DPS
  • 0020-87876 LINER LOWER Y2O3 COAT DPSII
  • 0020-89739 DOOR SLIT VALVE Y2O3 COAT 300MM DPS232
  • 0020-87845 LINER CATHODE Y203 W/SCREEN DPS?
  • 0020-87791 PLASMA SCREEN Y2O3 COATED 300MM DPSII/li>
  • 0200-06250 NOZZLE INSERT DG Y203 300MM DPS2
TEL
  • 1810-329037-13
  • 1810-121900-13
  • 1810-329064-12
  • 1810-121898-11
  • 1810-121899-12
  • 1810-121903-11
  • 1810-224951-11
  • 1810-224953-12
  • 1810-329022-13
  • 1810-329303-11
  • 1810-329078-11
  • 1810-329079-11
  • ES1D10-315183-15
  • ES1D10-102848-13
  • ES1D10-204418-12
  • ES1D10-204338-13
  • 3D10-100844-11 "RING
  • 3D10-101195-11 DEPO SHIELD
  • 3D10-100845-11 EXHAUST PLATE
  • 3D10-101152-13 SHUTTER
  • 3D10-100424-13 UEL (Upper Electrode)
  • 3D10-150295-11 DEPO SHIELD
  • 3D10-250574-11 SHUTTER
LAM
  • 715-027638-814 "CHMBR
  • 715-801021-838 "LINER
  • 715-801916-808 "PLT
  • 715-042721-858 "LINER
  • 715-027638-822 "CHMBR
  • 714-045744-008 "LINER
  • 714-045743-809 "LINER
  • 839-045710-807 "ASSY
  • 714-045709-002 "BLK
Chiller
DAIKIN
  • UBRP4CTL
  • UBRPD5A-1
  • UBR3ZB6
  • UBRP2AMPE
  • UBRPD5A-2
  • UBRPD5B-2
  • UBRPD5A-1T6
  • UCX05
  • UWC5AT
  • UWC5BT
  • UCX08A
  • UCX08B
  • UWCU3ATC
  • UWCU3ATW
  • UWCU3BTW
ATS
  • MP41C-DG-M1/M2
  • DEX-20A
  • MP41C-DG
TEL
  • INR-341-60
  • INR-341-54
  • INR-341-42
  • INR-497
  • INR-498
  • INR-499
  • CH1-CP-D0
  • CT-7
  • CT-8
  • CTM-8-22
  • CTM-8-21
  • T&H-CP等
  • T&H-VF等
  • RKS-400S
  • RKS-750-C
  • INR-499-201
  • D141
  • D214A
  • D215
  • D204
  • D230
  • CS240A
  • C240(C255)
  • C345-Q
  • CS355
AMAT
  • HX-150
  • AMAT-0
  • HX-300
  • AMAT-1
  • STEELHEAD
  • Endura Chiller
  • INR-498-012D
  • STEELHEAD
  • Quantum Heat Exchanger
LAM
  • Alliance
  • CHシリーズ
  • EX-2004
  • DEX-40AZ
HITACHI
  • CS-1500UL
  • CS-400AHF
  • CS-15NR
  • RCUJ150W
  • RCUP-300W2
DNS
  • UCX
  • UCX-05
  • RKS-750
SHINWA CONTROLS
  • T&H ESA-4-D-03
  • T&HNRE-2-13-00
  • CH1-H1-DO
  • CHL4E-21-03-10-00-B/01 R007
  • CHL4E-21-03-20-00-B6/1-R018
  • CHL4E-21-03-20-B1/6
  • CHX4E-21-03-20-00-E6/1
  • CHX4E-21-13-10-00-D6/0
  • CHX4E-21-13-10-00-E6/2
  • CH1-CP-D5(S1)
  • CH1-H22-T2
  • T&H CPC-2-NL
  • T&H-CPC-2-US
  • T&H-ESA-4-C-00
  • T&H-ESA-8-F-00
  • T&H-CP-1
  • T&H-CP-B1
  • T&H-CPA-1
  • T&H-CPA-2
  • T&H-CPB-2-M2
  • T&H-I-A-NF-RI
  • T&H-I-S-P
  • T&H-NRC-1-A-00
SMC
  • INR-341-16
  • INR-341-56
  • INR-341-57
  • INR-341-59
  • INR-341-63
  • INR-341-70
  • INR-496-003D
  • INR-498-011
  • INR-498-012
  • INR-498-043A
  • INR-499-056-X039
  • INR-499-063
  • INR-499-207
  • INR-498-043
  • INR-242-1D
  • HEC012-W2B-X91
  • HEC203W-2DM
  • HEC204WM
  • HRS050
  • HRS060
  • HRZ001-L-CZ
  • HRZ002-L
  • HRZ002-W
  • HRZ010-WS
  • HRS012-A-20
  • HRS018-A-20
  • HRS024-W-20
  • HRB4007Z-X003
  • INR-244-100A-2
  • INR-244-101A-2
  • INR-244-103B
  • INR-244-112
  • INR-244-117B
  • INR-244-119-X1
  • INR-244-215
  • INR-244-261
  • INR-244-264
  • INR-244-97B-B
  • INR-244-323-X38
  • INR-244-327
  • INR-244-376A
  • INR-244-404
  • INR-244-412
  • INR-244-602A
  • INR-244-626B
NESLAB
  • CFT-25
  • CFT-75
  • M-25
  • M-33
  • M-75
  • MX+500W D3
  • ENDURA(NESLAB?)
  • STEEL HEAD0
  • STEEL HEAD1
  • RTE-7
  • RTE-111
  • RTE-134
  • THERMO FLEX2500
  • DIMAX
  • RTE-740
RASCO
  • APT-4800-2TU-02
  • APT4800-2-TU-01
  • WTC-2100-AKT
  • WTC-D188-ANL/RI
RISSHI
  • CS-15W (CS-1200HW)
  • CS-200S-2
  • CS-400AH
  • CS-400SW
  • CS-600AH
  • CS-600AS
  • CS-750W
  • CS-800WH
  • CS-1000NR
  • CS-1000NS
  • CS-1100SL
  • CS-1100WT-12B
  • CS-1200W
  • CS-1500NR
  • CS-15000H
  • CS-17000H
  • CS-17000R
  • EX-1001
  • EX-2106
  • EXK-2001
  • EXK-2105
  • EXK-2109
  • EXL-1006
  • HR-101
  • HR-102
  • ER-3002
  • ER-3004
  • ER-3005
  • ER-3008
  • YR-8020SC
  • F-152D-3
  • FHE-203D-M
  • FHE-203D-U/J
  • CS-3000S-L
  • EXH-2003
  • FL-111
  • TC-21-R-CH1
  • FHS-101
  • FHS-103
  • FHS-105
  • EXH-1003
  • EXH-1004
  • EXH-1011
  • EXH-1012
  • MEX-1005
  • μEX-1004
  • μEX-1102
  • μEXH-1102
  • μEXH-1104
  • μEX-1201
  • μEX-2108
  • BBXR-306A
  • MMR-101
  • TR-3008
EYELA
  • CA-351LL
  • CA-3110
  • NCC-1420A
  • CTP-201
AFFINITY
  • RAA-002H-BB06CBC3
  • PAA-003B-CE50CBD3
  • RAA-012K-CD19CB
  • RAA-012K-CC55CBC4
  • PAA-003T-CE77-CBD3
NISHIYAMA INDUSTRY
  • H-050-G2
DAIDO KOGYO
  • DRS-7GN
ADVANTEC
  • LHB-10HW
  • LHB-10HD
  • LHB-10HDF
YAMATO SCIENTIFIC
  • BB300
TAITEC
  • CH-151BF
  • CH-400AHS-MO
  • CH-402BF
  • CH-400B
  • CH-601AF
  • CH-800B
  • CH-1500AS
  • CH-1500WS
  • CH-750WH
  • CH-750WS
  • CH-5500WS
  • CH-7500WS
  • CP-150R
  • EZL-80F
  • EZ-100-AMJ-A
SANEI GIKEN
  • TCW-3000LL
  • TCW-2000C
  • TCW-4000LC-G-02
  • TCW-6000CVL
AQUATECH
  • AQW-K5-TY-GMJ2
  • AQWK08-UV2P
  • ITC-K18(P)
  • AHW-K6-GB
  • AQW-K12-ATM
ORION
  • APS-200LLKP-C
  • HEU50-SP
  • RKS-750-CWA-2
  • RKL-5500-B1
  • RKL-5500VW-C1
  • RKS-250S-D2
  • RKS-400S-CW2
  • RKS-400S-CW3
  • RKS-400-V-A1
  • RKS-400VW-A1-PCP
  • RKS-500F
  • RKS-750VW-A-DS
  • KS-750-DWA
  • RKS-1500V-C
  • RKS-1500VW-D
  • RKE1500A-VW
  • RKF110-VWL-DI
  • RKF110-VWL-DS2
  • AP-750FSK-DW
  • ETN23A-SC-B
APISTE
  • ENC-2900EX
  • ENC-AR1120L
HYFRA
  • TRK90-0F-S
  • VWK70-D0-S
  • VWK90-1-S
VOMAT
  • FA120EKhS
  • FA-240
  • VOMAT120
KOMATSU
  • SPA-1520
  • CB-50A-A
  • E-24B1-1
  • E-331B-3
  • E-340B-2
  • E-341B-2
  • ER-641-2
  • ER-641-3
  • FR-521-A
  • FR-531-B
  • KCE-53WS-A
  • MCE-51W
  • MCE-83WS
  • MR-541
TEMPTORONIC
  • TPO3000A-0301
  • THX104991
  • TPO-3000A-SYSTE
  • TPO4300
ACCRETECH
  • ARTS-W3
  • SCU-600A
  • SCU-600B
  • SCU-600E
  • SCU-500B
  • SCU-500R
  • SCU-500S
TERMO TEK
  • P315-14885-2
POLYCOLD SYSTEMSINS
  • 1XCL-3
CKD
  • HYW2045-S22
FTS
  • RC211C-200
JULABO
  • PRESTO LH40
COHERENT
  • AIT-HE-KLA
KLH
  • W87/48TK4-P
LAB TECH
  • Smart H150-1000
COTRAN
  • CTR-20A
GOTECH
  • GT-7006-E
DISCO
  • DTU151
KAMUI
  • FA-HC230S1
AERO SPACE
  • 1231-CCN-DI-001
BAYVOLTEX
  • LT-HRE-1650-9650-S-WC-DC
DIEDEL
  • 631.1L4-D50W
EDWARDS
  • TCU40/80
ELKAY
  • W87/48TK4-P
EYELA
  • CA-351LL
  • CA-3110
  • NCC-1420A
  • CTP-201
JAT
  • ULG-9622-SR
NETZSCH(LAUDA)
  • ETK100/A
SILICON THERMAL
  • CH1300-LR
YUTING
  • KT-150CE
THOMAS KAGAKU
  • TRLC40
HOFFMAN
  • OEDRK330-V-2-S
KANTO SEIKI
  • SCSA-03
MURATA DENSHI
  • MT-W3DH-20
NIHON FREEZER
  • EP-400
MAGNET
AMAT
  • 0041-01138
  • 0010-01198
  • 0010-01231
  • 0010-01994
  • 0010-03485
  • 0010-03486
  • 0010-03487
  • 0010-03488
  • 0010-04065
  • 0010-04753
  • 0010-04941
  • 0010-06748
  • 0010-07563
  • 0010-09394
  • 0010-11228
  • 0010-12447
  • 0010-12530
  • 0010-12582
  • 0010-12864
  • 0010-14875
  • 0010-14916
  • 0010-20221
  • 0010-20222
  • 0010-20223
  • 0010-20224
  • 0010-20225
  • 0010-20258
  • 0010-20328
  • 0010-20389
  • 0010-20768
  • 0010-20806
  • 0010-20818
  • 0010-20819
  • 0010-20860
  • 0010-21020
  • 0010-21097
  • 0010-21127
  • 0010-21403
  • 0010-21465
  • 0010-21668
  • 0010-21676
  • 0010-21788
  • 0010-21810
  • 0010-21819
  • 0010-21844
  • 0010-21940
  • 0010-22043
  • 0010-23819
  • 0010-23840
  • 0010-25739
  • 0010-26439
  • 0010-26441
  • 0010-26442
  • 0010-26451
  • 0010-27417
  • 0010-30631
  • 0010-31177
  • 0010-33883
  • 0010-76693
  • 0020-01075
  • 0020-01995
  • 0020-01996
  • 0020-01997
  • 0020-01998
  • 0020-01999
  • 0020-02800
  • 0020-20157
  • 0020-20159
  • 0020-20297
  • 0020-20298
  • 0020-20299
  • 0020-20300
  • 0020-21386
  • 0020-22150
  • 0020-22152
  • 0020-22153
  • 0020-22373
  • 0020-22674
  • 0020-22675
  • 0020-22676
  • 0020-23559
  • 0020-24562
  • 0020-28491
  • 0020-54900
  • 0021-04527
  • 0021-08475
  • 0021-08478
  • 0021-08480
  • 0021-11382
  • 0021-13957
  • 0021-13959
  • 0021-20199
  • 0021-28993
  • 0021-53959
  • 0040-20100
  • 0040-20129
  • 0040-22651
  • 0040-22710
  • 0040-23053
  • 0040-23345
  • 0010-47599 200mm AMAT Magnet Assy
Spindle
NOVELLUS
  • 02-110772-00
  • 02-106507-00
  • 02-269293-00
  • 19-251714-00
  • 02-252432-00
  • 02-312735-00
  • 02-324753-00
  • 02-370104-00
  • 02-232432-00
  • 02-159137-00
  • 02-312753-00
  • 02-317274-00
  • 27-278697-00
  • 02-400832-00
  • 02-397379-00
  • 02-276537-00
Sensor
AMAT
  • 3030-06231 Ozone Sensor gFFOZ
  • API-452 Ozone Sensor API-452
Dome
NOVELLUS
  • 02-10387-00/01 Speed Dome
  • 02-307391-00 Speed Dome
  • 02-307446-00 Speed Dome
  • 02-293756-00 Speed Dome
  • 02-042566-00/01 Speed Dome
  • 02-336407-00 Speed Dome
  • 02-374705-00 Speed Dome
  • 02-282127-00 Speed Dome
LFM
HORIBA
  • LF-210A-EVD
  • LF-310A-EVD
  • LF-410A-EVD
  • LF-510A
  • LF-A30M-A-EVD
  • LF-A40M-A-EVD
  • LF-F30M-A-EVD
  • LF-F40M-A-EVD
  • LF-F50M-A
  • LV-410
  • LV-F40P
  • LV-F50P
VODM
MKS
  • VODMC33CR1BE
  • VODMB26565
  • VODMB23398
  • VODMC13CR1BE
Touch Panel
DIGITAL
  • 0020-10562
  • UF7811-2-DV1-24V / 90X0212-C
  • CM-X15/AMRMS / E925951
  • ET1725C-4NJE-3-G / 90X0212-C
  • CM-X15/AM / 90X0060

取扱製品一覧

半導体後工程関連部品
ポンプ・ターボポンプ
  • バリアン テクノロジーズ ジャパン リミテッド
  • PFEIFFER VACUUM(伯東)
  • アルカテル
  • ヘリックステクノロジー(株)
フィルター
  • 日本インテグリス(株)
  • 日本ポール(株)
  • BARNSTEAD
  • BALSTON
  • COHERENT
  • Lumonics
  • PURERON
真空・コンポーネンツ・ペローズ・ゲージ
  • バリアン テクノロジーズ ジャパン リミテッド
  • (株)ミラプロ
  • GRANVILLE PHILLIPS
  • THEMIONICS
Oリング・テフロンシール・磁気シール
SICパーツ・カーボン電極
  • 日立化成工業(株)
  • サンゴバン(株)
  • CARBORUNDUM
サセプター・静電チャック
石英パーツ
セラミックパーツ・インプラパーツ
  • ソルミックス・ジャパン(株)
  • COORS TEK KOREA〈韓国〉
薬品(HF-BHF)・エッチング材・ガス(WF6)・NFa・洗浄液
チラー
  • LASEM TECH. CO.,LTD〈韓国〉
Low-k材
  • 触媒化成工業(株)
ロングボート・横型ウエハボート
パワーサプライ・RF電源
  • ADVANCED ENERGY
  • POWER ONE
グリース
  • APIEZON
  • CASTROL
  • 日本工材(株)
  • 日本礦油(株)
  • KRYTOX
  • バリアン テクノロジーズ ジャパン リミテッド
レーザーマーカー
  • 進和テック(株)
  • ゼネラルスキャンニング
OA機器・カメラ
シリンダー・ショックアブソーバー
  • BIMBA
  • ENICOTE.PROTECTION
  • LIN-ACT
  • TOKIKO
  • アツギユニシア
ベアリング
  • KEYDON
  • MCGILL
コンダクトビン
  • INTERCONECT
パーツ特殊洗浄
  • ECT
再生ウエハー
  • (株)KNプラッツ
石油商品
  • モービル石油(株)
  • 昭和シェル石油(株)
  • 出光興産(株)
  • 日本礦油(株)
  • 新日本石油(株)
バッテリー・UPS用バッテリー
  • (株)ジーエス・ユアサパワーサプライ
  • VARTA
  • 新神戸電気(株)
  • HAWKER ENERGY
ステンレスベルト金網
  • 太陽金網(株)
電熱ヒーター
  • 坂口電熱(株)
  • WATLOW
  • 日本発条(株)
モーター
  • LUCAS
  • PMI MOTION TECHNOROGY
  • GLOBE MOTOR
  • BALDOR
  • Barber Colmam
  • MINARIK ELECTRIC
  • PITMAN
インク関連商品
  • FOXJET
  • BANCHTEC
  • XANDEX
  • PANASONIC
メーター・ブレーカー
  • AIR-PAX
  • BECKMAN
  • Beckman.Industrial
  • CLAROSTAT
事務機・粘着マット
  • イトーキ(株)
  • コクヨ(株)
  • (株)スミロン
電装品・コネクター・スイッチ・トランジスタ・プラグ・センサー・WIRING DEVICE・増幅器・抵抗リレーサムホイールSW FAN トランス
  • ALTERA.CORP
  • ANORAD CORP
  • BARBER COLMAN
  • MIDOCOM
  • MORRIS COUPLING
  • GSI Lumonics Inc.
  • Honewell Data I
  • HOBBS
  • Micro Switch
  • NETGEAR
  • MOTOROLA
  • SHRANDER SCIENTIFIC
  • BANNER ENGINEERING
  • BAUMER ELECTRIC
  • BCamloc
  • EMERSON
  • FAUL HARADER
  • H.H/SMITH
  • HAMLIN
  • HUBELL
  • CAPAL
  • MAGNECRAFT
  • AUTOMATIC SWITCH CO
  • MAUREY INSTRUMENT CORP
  • PROTEUS INDUTRIES
  • TI
  • 日本パルスモーター
  • 日本モトローラ
  • ARROW-HART
  • BURR-BROWN
  • CADDOCK
  • CRYDOM
  • CHRRY ELECT
  • COMAIOR
  • MECHATRONICS
  • 山洋電気(株)
  • ROBITECH
  • DOLAN-JENNEN INDUSTRIIE
  • Potential
  • Potter and Brumfield
  • THE SUPERIOR ELECTRIC
  • アナログデバイス